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Efficient coupler between silicon photonic and metal-insulator-silicon-metal plasmonic waveguides

Emboras, A. and Briggs, R. M. and Najar, A. and Nambiar, S. and Delacour, C. and Grosse, Ph. and Augendre, E. and Fedeli, J. M. and de Salvo, B. and Atwater, H. A. and Espiau de Lamaestre, R. (2012) Efficient coupler between silicon photonic and metal-insulator-silicon-metal plasmonic waveguides. Applied Physics Letters, 101 (25). Art. No. 251117. ISSN 0003-6951. doi:10.1063/1.4772941.

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We report the experimental realization of a compact, efficient coupler between silicon waveguides and vertical metal-insulator-silicon-metal (MISM) plasmonic waveguides. Devices were fabricated using complementary metal-oxide-silicon technology processes, with copper layers that support low-loss plasmonic modes in the MISM structures at a wavelength of 1550 nm. By implementing a short (0.5 μm) optimized metal-insulator-silicon-insulator structure inserted between the photonic and plasmonic waveguide sections, we demonstrate experimental coupling loss of 2.5 dB, despite the high optical confinement of the MISM mode and mismatch with the silicon waveguide mode.

Item Type:Article
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Atwater, H. A.0000-0001-9435-0201
Additional Information:© 2012 American Institute of Physics. Received 7 September 2012; accepted 6 December 2012; published online 21 December 2012. This work has been supported by the French National Agency (ANR) through LETI Carnot Funding. We acknowledge the LETI CMOS platform team for assistance in sample fabrication and K. Gilbert for technical contribution to the optical experiments.
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Agence Nationale pour la Recherche (ANR)UNSPECIFIED
Subject Keywords:CMOS integrated circuits; copper; integrated optics; optical couplers; optical waveguides; plasmonics
Issue or Number:25
Classification Code:PACS: 42.79.Gn; 42.82.-m; 73.20.Mf
Record Number:CaltechAUTHORS:20130124-084326829
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Official Citation:Efficient coupler between silicon photonic and metal-insulator-silicon-metal plasmonic waveguides A. Emboras, R. M. Briggs, A. Najar, S. Nambiar, C. Delacour, Ph. Grosse, E. Augendre, J. M. Fedeli, B. de Salvo, H. A. Atwater, and R. Espiau de Lamaestre, Appl. Phys. Lett. 101, 251117 (2012), DOI:10.1063/1.4772941
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:36558
Deposited By: Jason Perez
Deposited On:24 Jan 2013 21:19
Last Modified:09 Nov 2021 23:22

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