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Cantilever actuated by piezoelectric Parylene-C

Kim, Justin Young-Hyun and Nandra, Mandheerej and Tai, Yu-Chong (2012) Cantilever actuated by piezoelectric Parylene-C. In: 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems. IEEE , Piscataway, NJ, pp. 1141-1144. ISBN 978-1-4673-0325-5.

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We developed the first MEMS cantilever resonator actuated by piezoelectric Parylene-C, which is a new piezoelectric material for its integration into/with MEMS because it can be deposited at room temperature and electrically poled at 200°C with 400V of DC bias. After our first report on Parylene-C as a new piezoelectric material, we demonstrated here the first MEMS cantilever resonator actuated by piezoelectric PA-C.

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Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2012 IEEE. Date of Current Version: 15 March 2012.
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INSPEC Accession Number12618207
Record Number:CaltechAUTHORS:20130201-102857337
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Official Citation:Kim, J.Y.-H.; Nandra, M.; Yu-chong Tai; , "Cantilever actuated by piezoelectric Parylene-C," Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on , vol., no., pp.1141-1144, Jan. 29 2012-Feb. 2 2012 doi: 10.1109/MEMSYS.2012.6170364
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:36738
Deposited By: Tony Diaz
Deposited On:08 Feb 2013 23:31
Last Modified:09 Nov 2021 23:24

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