Kim, Justin Young-Hyun and Nandra, Mandheerej and Tai, Yu-Chong (2012) Cantilever actuated by piezoelectric Parylene-C. In: 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems. IEEE , Piscataway, NJ, pp. 1141-1144. ISBN 978-1-4673-0325-5. https://resolver.caltech.edu/CaltechAUTHORS:20130201-102857337
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Abstract
We developed the first MEMS cantilever resonator actuated by piezoelectric Parylene-C, which is a new piezoelectric material for its integration into/with MEMS because it can be deposited at room temperature and electrically poled at 200°C with 400V of DC bias. After our first report on Parylene-C as a new piezoelectric material, we demonstrated here the first MEMS cantilever resonator actuated by piezoelectric PA-C.
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| Additional Information: | © 2012 IEEE. Date of Current Version: 15 March 2012. | |||||||||
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| DOI: | 10.1109/MEMSYS.2012.6170364 | |||||||||
| Record Number: | CaltechAUTHORS:20130201-102857337 | |||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20130201-102857337 | |||||||||
| Official Citation: | Kim, J.Y.-H.; Nandra, M.; Yu-chong Tai; , "Cantilever actuated by piezoelectric Parylene-C," Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on , vol., no., pp.1141-1144, Jan. 29 2012-Feb. 2 2012 doi: 10.1109/MEMSYS.2012.6170364 | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 36738 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | Tony Diaz | |||||||||
| Deposited On: | 08 Feb 2013 23:31 | |||||||||
| Last Modified: | 09 Nov 2021 23:24 |
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