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Reflection high-energy electron diffraction analysis of polycrystalline films with grain size and orientation distributions

Hartman, J. W. and Brewer, R. T. and Atwater, Harry A. (2002) Reflection high-energy electron diffraction analysis of polycrystalline films with grain size and orientation distributions. Journal of Applied Physics, 92 (9). pp. 5133-5139. ISSN 0021-8979. doi:10.1063/1.1510954.

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We report a computationally efficient algorithm to calculate reflection high-energy electron diffraction (RHEED) intensities from well-textured, small-grained polycrystalline films in the kinematic limit. We also show how the intensity maps of the spots in a RHEED pattern from such a film can be quantitatively analyzed to determine the film's average grain size, as well as its in-plane orientation and texture distributions. We find that the in-plane orientation and texture distribution widths of these films can be determined to within 1 degree and that the average lateral grain size can be measured to within a fraction of a nanometer after suitable calibration of our technique.

Item Type:Article
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URLURL TypeDescription
Atwater, Harry A.0000-0001-9435-0201
Additional Information:© 2002 American Institute of Physics. Received 24 June 2002; accepted 5 August 2002. This work was supported by the DARPA Virtual Integrated Prototyping program and ARO MURI on "Engineering Microstructural Complexity in Ferroelectric Thin Films," Grant No. DAAD 19-01-1-0517. One of us (R.T.B.) is grateful for support from the Intel Foundation.
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
Army Research Office (ARO)DAAD 19-01-1-0517
Intel FoundationUNSPECIFIED
Subject Keywords:magnesium compounds; reflection high energy electron diffraction; physics computing; grain size; crystal orientation; texture; thin films
Issue or Number:9
Record Number:CaltechAUTHORS:HARjap02
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:3709
Deposited By: Tony Diaz
Deposited On:29 Jun 2006
Last Modified:08 Nov 2021 20:11

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