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High Quality Factor Parylene-Based Intraocular Pressure Sensor

Lin, Jeffrey Chun-Hui and Zhao, Yu and Chen, Po-Jui and Tai, Yu-Chong (2012) High Quality Factor Parylene-Based Intraocular Pressure Sensor. In: IEEE-NEMS 2012: 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. IEEE , Piscataway, NJ, pp. 137-140. ISBN 978-1-4673-1122-9. https://resolver.caltech.edu/CaltechAUTHORS:20130409-143507277

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Abstract

A new concept of the intraocular pressure (IOP) sensor design and its implantation approach are presented in this paper. A parylene-based sensing part with about 30 μm in thickness was fabricated, and then integrated with an implantation tube attached to sensor's backside pressure access hole. During the implantation, only the implantation tube was implanted into the anterior chamber to fulfill minimally invasive implantation. The IOP sensor membrane is thin and flexible so that it can attach to the cornea. Because the sensing area was exposed outside to the air all the time, the quality factor can be kept at 27-30 to maintain the sensing distance during the whole testing pressure range. The sensitivity is obtained as high as 542 ppm/mmHg while the responsivity is about 205 kHz/mmHg, which is suitable for biomedical applications.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1109/NEMS.2012.6196741DOIUNSPECIFIED
http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6196741PublisherUNSPECIFIED
ORCID:
AuthorORCID
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2012 IEEE. This work is supported by the Biomimetic MicroElectronic Systems (BMES) Center under the grant number H31068. The authors would like to thank Trevor Roper's help in terms of sample preparation, machines' maintenance, and instrument's installation.
Funders:
Funding AgencyGrant Number
Biomimetic MicroElectronic Systems (BMES) CenterH31068
Subject Keywords:Intraocular implant, Intraocular pressure, pressure sensor, Glaucoma, Parylene
Other Numbering System:
Other Numbering System NameOther Numbering System ID
INSPEC Accession Number12725742
DOI:10.1109/NEMS.2012.6196741
Record Number:CaltechAUTHORS:20130409-143507277
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20130409-143507277
Official Citation:Lin, J.C.-H.; Yu Zhao; Po-Jui Chen; Yu-Chong Tai, "High quality factor parylene-based intraocular pressure sensor," Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on , vol., no., pp.137,140, 5-8 March 2012 doi: 10.1109/NEMS.2012.6196741
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:37834
Collection:CaltechAUTHORS
Deposited By: Ruth Sustaita
Deposited On:09 Apr 2013 22:04
Last Modified:09 Nov 2021 23:31

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