Brewer, Rhett T. and Atwater, Harry A. (2002) Rapid biaxial texture development during nucleation of MgO thin films during ion beam-assisted deposition. Applied Physics Letters, 80 (18). pp. 3388-3390. ISSN 0003-6951. doi:10.1063/1.1476385. https://resolver.caltech.edu/CaltechAUTHORS:BREapl02
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Abstract
We propose a mechanism for the nucleation of highly aligned biaxially textured MgO on amorphous Si3N4 during ion beam-assisted deposition. Using transmission electron microscopy, reflection high-energy electron diffraction, energy dispersive x-ray analysis, and ellipsometery, we have observed that highly aligned biaxially textured grains emerge from a "diffraction-amorphous" film when the film thickens from 3.5 to 4.5 nm. Transmission electron microscopy dark-field images also show the onset of rapid grain growth during this same film thickness interval. These results suggest biaxial texturing through aligned solid phase crystallization.
Item Type: | Article | ||||||||
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Additional Information: | © 2002 American Institute of Physics. Received 8 February 2002; accepted 5 March 2002. This work was supported by the DARPA VIP III program, ARO MURI Grant No. DAAD 19-01-1-0517, and the Intel Foundation. | ||||||||
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Subject Keywords: | magnesium compounds; ion beam assisted deposition; nucleation; transmission electron microscopy; reflection high energy electron diffraction; X-ray chemical analysis; ellipsometry; grain growth; crystallisation; texture | ||||||||
Issue or Number: | 18 | ||||||||
DOI: | 10.1063/1.1476385 | ||||||||
Record Number: | CaltechAUTHORS:BREapl02 | ||||||||
Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:BREapl02 | ||||||||
Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||||
ID Code: | 3829 | ||||||||
Collection: | CaltechAUTHORS | ||||||||
Deposited By: | Tony Diaz | ||||||||
Deposited On: | 13 Jul 2006 | ||||||||
Last Modified: | 08 Nov 2021 20:12 |
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