Grétillat, M.-A. and Linder, C. and Dommann, A. and Staufert, G. and de Rooij, N. F. and Nicolet, M. A. (1998) Surface-micromachined Ta–Si–N beams for use in micromechanics. Journal of Micromechanics and Microengineering, 8 (2). pp. 88-90. ISSN 0960-1317. https://resolver.caltech.edu/CaltechAUTHORS:GREjmm98
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Abstract
Realization and characterization of free-standing surface-microstructures based on Ta-Si-N films are presented. Due to their significant physical and chemical properties, such ternary films are promising candidates for application in microelectromechanical devices.
| Item Type: | Article | ||||||
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| Additional Information: | © 1998 IOP Publishing Ltd. Received 12 August 1997, accepted for publication 2 December 1997. Print publication: Issue 2 (June 1998). | ||||||
| Issue or Number: | 2 | ||||||
| Record Number: | CaltechAUTHORS:GREjmm98 | ||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:GREjmm98 | ||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||
| ID Code: | 390 | ||||||
| Collection: | CaltechAUTHORS | ||||||
| Deposited By: | Archive Administrator | ||||||
| Deposited On: | 08 Jun 2005 | ||||||
| Last Modified: | 02 Oct 2019 22:33 |
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