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Effects of deposition temperature on Parylene-C properties

Kang, Dongyang and Standley, Andrew and Chang, Jay Han-Chieh and Liu, Yang and Tai, Yu-Chong (2013) Effects of deposition temperature on Parylene-C properties. In: IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE , Piscataway, NJ, pp. 389-392. ISBN 978-1-4673-5654-1. https://resolver.caltech.edu/CaltechAUTHORS:20130729-090934013

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Abstract

This paper reports the study of in-situ deposition temperature (ranging from 20°C to 80°C) effects on Parylene-C properties in terms of glass transition temperature (T_g), β-relaxation temperature (T_β), Young's modulus and crystallinity (including crystallite size). The results show that the Parylene-C (PA-C) thin film deposited at higher deposition temperature exhibits higher T_g and T_β, revealing that the movement of the molecular backbones is further frozen and restricted. It is physically consistent with the data showing that higher deposition temperature induces greater degree of crystallinity and larger Young's modulus. With the new knowledge, Parylene-C thin film with properties tailored to various requirements could be achieved by choosing the proper deposition temperature.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1109/MEMSYS.2013.6474260 DOIArticle
http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6474260PublisherArticle
ORCID:
AuthorORCID
Liu, Yang0000-0002-8155-9134
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2013 IEEE. The authors would like to thank all the colleagues working in the Caltech Micromaching Laboratory for their generous help in the sample preparation and discussion of the experiments.
Other Numbering System:
Other Numbering System NameOther Numbering System ID
INSPEC Accession Number13369904
DOI:10.1109/MEMSYS.2013.6474260
Record Number:CaltechAUTHORS:20130729-090934013
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20130729-090934013
Official Citation:Dongyang Kang; Standley, A.; Chang, J.H.; Yang Liu; Yu-Chong Tai, "Effects of deposition temperature on Parylene-C properties," Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on , vol., no., pp.389,390, 20-24 Jan. 2013 doi: 10.1109/MEMSYS.2013.6474260
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:39616
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:29 Jul 2013 21:44
Last Modified:09 Nov 2021 23:46

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