Huang, Z. and Li, W.-D and Santori, C. and Acosta, V. M. and Faraon, A. and Ishikawa, T. and Wu, W. and Winston, D. and Williams, R. S. and Beausoleil, R. G. (2013) Diamond nitrogen-vacancy centers created by scanning focused helium ion beam and annealing. Applied Physics Letters, 103 (8). Art. No. 081906. ISSN 0003-6951. doi:10.1063/1.4819339. https://resolver.caltech.edu/CaltechAUTHORS:20131002-104017438
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Abstract
We demonstrate a method to create nitrogen-vacancy (NV) centers in diamond using focused helium ion microscopy. Near-surface NV centers can be created with spatial resolution below 0.6 μm. We studied the density, creation efficiency, and spectral linewidths at optical and microwave frequencies for NV centers produced using various helium ion implantation doses. The optical linewidths are narrower than those of similar nitrogen-vacancy centers produced using nitrogen ion implantation.
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| Additional Information: | © 2013 AIP Publishing LLC. Received 3 May 2013; accepted 12 August 2013; published online 23 August 2013. This manuscript is based on work supported by the Defense Advanced Research Projects Agency (Award No. HR0011-09-1-0006) and the Regents of the University of California. W.-D. Li was supported in part by the Small Project Funding (201209176202) from the University of Hong Kong. We thank Professor Kai-Mei Fu at the University of Washington for helpful discussions. | |||||||||
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| Subject Keywords: | annealing, diamond, helium, ion beam effects, ion implantation, ion microscopy, nitrogen, vacancies (crystal) | |||||||||
| Issue or Number: | 8 | |||||||||
| Classification Code: | PACS: 61.72.jd, 61.72.up, 81.40.Gh | |||||||||
| DOI: | 10.1063/1.4819339 | |||||||||
| Record Number: | CaltechAUTHORS:20131002-104017438 | |||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20131002-104017438 | |||||||||
| Official Citation: | Diamond nitrogen-vacancy centers created by scanning focused helium ion beam and annealing Z. Huang, W.-D. Li, C. Santori, V. M. Acosta, A. Faraon, T. Ishikawa, W. Wu, D. Winston, R. S. Williams, and R. G. Beausoleil Appl. Phys. Lett. 103, 081906 (2013) | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 41608 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | Ruth Sustaita | |||||||||
| Deposited On: | 02 Oct 2013 17:58 | |||||||||
| Last Modified: | 10 Nov 2021 04:32 |
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