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Theoretical Modeling for a Six-DOF Vortex Inertial Sensor and Experimental Verification

Chang, Honglong and Zhou, Pingwei and Xie, Zhongjian and Gong, Xianghui and Yang, Yong and Yuan, Weizheng (2013) Theoretical Modeling for a Six-DOF Vortex Inertial Sensor and Experimental Verification. Journal of Microelectromechanical Systems, 22 (5). pp. 1100-1108. ISSN 1057-7157. https://resolver.caltech.edu/CaltechAUTHORS:20131111-133549668

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Abstract

This paper reports on a multi-axis fluidic inertial sensor that can detect three components of angular rate and linear acceleration. The sensor uses a vortex gas flow instead of the traditional linear gas flow as the inertial mass to detect the angular rate and linear acceleration. For this complex multi-axis sensing scheme, the theoretical modeling for the sensitivity and the cross-axis sensitivity of the sensor are discussed in detail. During the verification of the sensor's performance, the vortex was created by jetting the air supplied by an external air pump into a detection chamber via two opposing nozzle orifices in opposite directions. A configuration of microfabricated thermistors was constructed to realize multi-axis detection. The measured sensitivities of the gyroscope for the x-axis, y-axis, and z-axis were 0.429, 0.338, and 0.159 mV/°/s, respectively. The measured sensitivities of the accelerometer for the x-axis, y-axis, and z-axis were 0.185, 0.180, and 0.133 V/g, respectively. The results prove that the vortex sensor can effectively detect six-degree-of-freedom spatial motion.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1109/JMEMS.2013.2271862DOIArticle
http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6557016PublisherArticle
Additional Information:© 2013 IEEE. Manuscript received August 13, 2012; revised May 23, 2013; accepted June 25, 2013. Date of publication July 10, 2013; date of current version September 27, 2013. This work was supported in part by the Chinese National Science Foundation under Grant 61273052, in part by the Chinese New Century Excellent Talents in University under Grant NCET-10-0077, in part by the Shaanxi Province Science and Technology Planning and Innovative Project under Grant 2011KTCQ01-26, and in part by the 111 Project under Grant B13044. Subject Editor C. Liu. The authors gratefully acknowledge Prof. Michael Kraft, Professor at University of Southampton, U.K, for his helpful discussions. Professor Kraft provided many helpful suggestions regarding the content this paper and corrections to grammatical errors.
Funders:
Funding AgencyGrant Number
Chinese National Science Foundation61273052
Chinese New Century Excellent Talents in UniversityNCET-10-0077
Shaanxi Province Science and Technology Planning and Innovative Project2011KTCQ01-26
111 ProjectB13044
Subject Keywords:Gyroscope, accelerometer, thermistors, fluidic microsystems.
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INSPEC Accession Number:13796374
Issue or Number:5
Record Number:CaltechAUTHORS:20131111-133549668
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20131111-133549668
Official Citation:Honglong Chang; Pingwei Zhou; Zhongjian Xie; Xianghui Gong; Yong Yang; Weizheng Yuan, "Theoretical Modeling for a Six-DOF Vortex Inertial Sensor and Experimental Verification," Microelectromechanical Systems, Journal of , vol.22, no.5, pp.1100,1108, Oct. 2013 doi: 10.1109/JMEMS.2013.2271862
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:42354
Collection:CaltechAUTHORS
Deposited By: Ruth Sustaita
Deposited On:11 Nov 2013 22:53
Last Modified:03 Oct 2019 05:57

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