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Scalable Method for the Fabrication and Testing of Glass-Filled, Three-Dimensionally Sculpted Extraordinary Transmission Apertures

Walavalkar, Sameer S. and Latawiec, Pawel and Homyk, Andrew P. and Scherer, Axel (2014) Scalable Method for the Fabrication and Testing of Glass-Filled, Three-Dimensionally Sculpted Extraordinary Transmission Apertures. Nano Letters, 14 (1). pp. 311-317. ISSN 1530-6984. http://resolver.caltech.edu/CaltechAUTHORS:20140207-111308356

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Abstract

This Letter features a new, scalable fabrication method and experimental characterization of glass-filled apertures exhibiting extraordinary transmission. These apertures are fabricated with sizes, aspect ratios, shapes, and side-wall profiles previously impossible to create. The fabrication method presented utilizes top-down lithography to etch silicon nanostructures. These nanostructures are oxidized to provide a transparent template for the deposition of a plasmonic metal. Gold is deposited around these structures, reflowed, and the surface is planarized. Finally, a window is etched through the substrate to provide optical access. Among the structures created and tested are apertures with height to diameter aspect ratios of 8:1, constructed with rectangular, square, cruciform, and coupled cross sections, with tunable polarization sensitivity and displaying unique properties based on their sculpted side-wall shape. Transmission data from these aperture arrays is collected and compared to examine the role of spacing, size, and shape on their overall spectral response. The structures this Letter describes can have a variety of novel applications from the creation of new types of light sources to massively multiplexed biosensors to subdiffraction limit imaging techniques.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1021/nl4040576DOIArticle
http://pubs.acs.org/doi/abs/10.1021/nl4040576PublisherArticle
http://pubs.acs.org/doi/suppl/10.1021/nl4040576Related ItemSupporting Information
http://www.ncbi.nlm.nih.gov/pubmed/24308662OrganizationPubMed
ORCID:
AuthorORCID
Walavalkar, Sameer S.0000-0002-7628-9600
Additional Information:© 2013 American Chemical Society. Published In Issue: January 08, 2014; Article ASAP: December 10, 2013; Just Accepted Manuscript: December 05, 2013; Received: October 31, 2013; Revised: November 27, 2013. The authors declare no competing financial interest. Detailed fabrication methodology and a video of the polarization sensitivity shown in Figure 4. This material is available free of charge via the Internet at http://pubs.acs.org. This work was supported by the Advanced Energy Consortium under the BEG10-07 grant, the Boeing corporation under the CT-BA-GTA-1 grant, and by the National Science Foundation under the NSF CIAN ERC (EEC-0812072) grant. S.W. thanks W. Fegadolli, E. Nelson-Clark, and R. E. Moses for useful discussion during the preparation of this manuscript and Lou Nelson for his tireless and knowledgeable support. The authors also thank the staff of the Kavli Nanoscience Institute for their continued help.
Group:Kavli Nanoscience Institute
Funders:
Funding AgencyGrant Number
Advanced Energy ConsortiumBEG10-07
Boeing Corporation CT-BA-GTA-1
NSF CIAN ERCEEC-0812072
Subject Keywords:Plasmonics; extraordinary transmission; silicon nanofabrication; biosensing; templated fabrication
Record Number:CaltechAUTHORS:20140207-111308356
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20140207-111308356
Official Citation:Walavalkar, S. S., Latawiec, P., Homyk, A. P., Scherer, & Axel. (2013). Scalable Method for the Fabrication and Testing of Glass-Filled, Three-Dimensionally Sculpted Extraordinary Transmission Apertures. Nano Letters, 14(1), 311-317. doi: 10.1021/nl4040576
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:43721
Collection:CaltechAUTHORS
Deposited By: Bianca Rios
Deposited On:10 Feb 2014 19:15
Last Modified:23 Feb 2018 22:31

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