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Electrostatic micro-actuator with a pre-charged series capacitor: modeling, design, and demonstration

Yang, Hyun-Ho and Han, Chang-Hoon and Lee, Jeong-Oen and Yoon, Jun-Bo (2014) Electrostatic micro-actuator with a pre-charged series capacitor: modeling, design, and demonstration. Journal of Micromechanics and Microengineering, 24 (6). Art. No. 065012. ISSN 0960-1317. http://resolver.caltech.edu/CaltechAUTHORS:20140626-142707466

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Abstract

As a powerful method to reduce actuation voltage in an electrostatic micro-actuator, we propose and investigate an electrostatic micro-actuator with a pre-charged series capacitor. In contrast to a conventional electrostatic actuator, the injected pre-charges into the series capacitor can freely modulate the pull-in voltage of the proposed actuator even after the completion of fabrication. The static characteristics of the proposed actuator were investigated by first developing analytical models based on a parallel-plate capacitor model. We then successfully designed and demonstrated a micro-switch with a pre-charged series capacitor. The pull-in voltage of the fabricated micro-switch was reduced from 65.4 to 0.6 V when pre-charged with 46.3 V. The on-resistance of the fabricated micro-switch was almost the same as the initial one, even when the device was pre-charged, which was demonstrated for the first time. All results from the analytical models, finite element method simulations, and measurements were in good agreement with deviations of less than 10%. This work can be favorably adapted to electrostatic micro-switches which need a low actuation voltage without noticeable degradation of performance.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://iopscience.iop.org/0960-1317/24/6/065012PublisherArticle
http://dx.doi.org/10.1088/0960-1317/24/6/065012DOIArticle
Additional Information:© 2014 Institute of Physics. Received 14 January 2014, revised 4 April 2014. Accepted for publication 8 April 2014. Published 6 May 2014. The authors would like to thank graduate students of the 3D Micro-Nano Structures laboratory in KAIST. This work was supported by a National Research Foundation of Korea (NRF no. 2011-0028781) grant funded by the Korean Government (MEST).
Funders:
Funding AgencyGrant Number
National Research Foundation of Korea (NRF)2011-0028781
Korean Government (MEST)UNSPECIFIED
Subject Keywords:MEMS, electrostatic actuation, micro-actuator
Classification Code:PACS: 85.85.+j, 07.10.Cm, 84.32.Tt, 07.07.Tw, 84.32Dd
Record Number:CaltechAUTHORS:20140626-142707466
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20140626-142707466
Official Citation:Electrostatic micro-actuator with a pre-charged series capacitor: modeling, design, and demonstration Hyun-Ho Yang et al 2014 J. Micromech. Microeng. 24 065012
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:46536
Collection:CaltechAUTHORS
Deposited By: Ruth Sustaita
Deposited On:26 Jun 2014 21:52
Last Modified:26 Jun 2014 21:52

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