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Linear and nonlinear capacitive coupling of electro-opto-mechanical photonic crystal cavities

Pitanti, Alessandro and Fink, Johannes M. and Safavi-Naeini, Amir H. and Lei, Chan U. and Hill, Jeff T. and Tredicucci, Alessandro and Painter, Oskar (2014) Linear and nonlinear capacitive coupling of electro-opto-mechanical photonic crystal cavities. . (Submitted)

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We fabricate and characterize a microscale silicon electro-opto-mechanical system whose mechanical motion is coupled capacitively to an electrical circuit and optically via radiation pressure to a photonic crystal cavity. To achieve large electromechanical interaction strength, we implement an inverse shadow mask fabrication scheme which obtains capacitor gaps as small as 30 nm while maintaining a silicon surface quality necessary for minimizing optical loss. Using the sensitive optical read-out of the photonic crystal cavity, we characterize the linear and nonlinear capacitive coupling to the fundamental 63 MHz in-plane flexural motion of the structure, showing that the large electromechanical coupling in such devices may be suitable for realizing efficient microwave-to-optical signal conversion.

Item Type:Report or Paper (Discussion Paper)
Related URLs:
URLURL TypeDescription Paper
Fink, Johannes M.0000-0001-8112-028X
Safavi-Naeini, Amir H.0000-0001-6176-1274
Painter, Oskar0000-0002-1581-9209
Additional Information:This work was supported by the DARPA MESO program, the AFOSR Hybrid Nanophotonics MURI, the Institute for Quantum Information and Matter, an NSF Physics Frontiers Center with support of the Gordon and Betty Moore Foundation, and the Kavli Nanoscience Institute at Caltech. AP gratefully acknowledge funding from EU through Marie Curie Actions, project NEMO (GA 298861). AT acknowledges partial financial support from the ERC through the advanced grant SoulMan.
Group:Institute for Quantum Information and Matter, Kavli Nanoscience Institute
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
Air Force Office of Scientific Research (AFOSR)UNSPECIFIED
Institute for Quantum Information and Matter (IQIM)UNSPECIFIED
NSF Physics Frontiers CenterUNSPECIFIED
Gordon and Betty Moore FoundationUNSPECIFIED
Kavli Nanoscience InstituteUNSPECIFIED
Marie Curie FellowshipGA 298861
European Research Council (ERC)SoulMan
Record Number:CaltechAUTHORS:20140728-081038978
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:47509
Deposited By: Tony Diaz
Deposited On:28 Jul 2014 16:21
Last Modified:02 Jun 2023 00:20

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