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Manufacture of micro-sensors and actuators for flow control

Arthur, G. G. and McKeon, B. J. and Dearing, S. S. and Morrison, J. F. and Cui, Z. (2006) Manufacture of micro-sensors and actuators for flow control. Microelectronic Engineering, 83 (4-9). pp. 1205-1208. ISSN 0167-9317. http://resolver.caltech.edu/CaltechAUTHORS:20141008-165129047

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Abstract

The design, manufacture and testing of micro-sensors and -actuators for aerodynamic drag reduction by flow control is described. Key factors in the designs are discussed, for example, the type and shape of the actuator electrodes affect the critical parameters of frequency response and deflection amplitude. Some aspects of future work are also covered.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1016/j.mee.2006.01.171DOIArticle
http://www.sciencedirect.com/science/article/pii/S0167931706002656PublisherArticle
ORCID:
AuthorORCID
McKeon, B. J.0000-0003-4220-1583
Contact Email Address:mckeon@caltech.edu
Additional Information:Copyright © 2006 Elsevier. The authors acknowledge the Engineering and Physical Sciences Research Council, UK who supported this work under Grant No. GR/S20994, which was also part-funded by the Defence Science and Technology Laboratory through the Joint Grants Scheme. B.J. McKeon is grateful to the Royal Society for a Dorothy Hodgkin Fellowship.
Group:GALCIT
Funders:
Funding AgencyGrant Number
Engineering and Physical Sciences Research Council (EPSRC)GR/S20994
Defence Science and Technology LaboratoryUNSPECIFIED
Royal Society Dorothy Hodgkin FellowshipUNSPECIFIED
Subject Keywords:MEMS; Airflow control; Electroactive polymers; EAPs; Pressure sensors; Micro-actuators
Record Number:CaltechAUTHORS:20141008-165129047
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20141008-165129047
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:50291
Collection:CaltechAUTHORS
Deposited By: Jamie Sei
Deposited On:09 Oct 2014 19:43
Last Modified:21 Sep 2016 22:21

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