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Manufacture of micro-sensors and actuators for flow control

Arthur, G. G. and McKeon, B. J. and Dearing, S. S. and Morrison, J. F. and Cui, Z. (2006) Manufacture of micro-sensors and actuators for flow control. Microelectronic Engineering, 83 (4-9). pp. 1205-1208. ISSN 0167-9317. doi:10.1016/j.mee.2006.01.171.

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The design, manufacture and testing of micro-sensors and -actuators for aerodynamic drag reduction by flow control is described. Key factors in the designs are discussed, for example, the type and shape of the actuator electrodes affect the critical parameters of frequency response and deflection amplitude. Some aspects of future work are also covered.

Item Type:Article
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McKeon, B. J.0000-0003-4220-1583
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Additional Information:Copyright © 2006 Elsevier. The authors acknowledge the Engineering and Physical Sciences Research Council, UK who supported this work under Grant No. GR/S20994, which was also part-funded by the Defence Science and Technology Laboratory through the Joint Grants Scheme. B.J. McKeon is grateful to the Royal Society for a Dorothy Hodgkin Fellowship.
Funding AgencyGrant Number
Engineering and Physical Sciences Research Council (EPSRC)GR/S20994
Defence Science and Technology LaboratoryUNSPECIFIED
Royal Society Dorothy Hodgkin FellowshipUNSPECIFIED
Subject Keywords:MEMS; Airflow control; Electroactive polymers; EAPs; Pressure sensors; Micro-actuators
Issue or Number:4-9
Record Number:CaltechAUTHORS:20141008-165129047
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:50291
Deposited By: Jamie Sei
Deposited On:09 Oct 2014 19:43
Last Modified:10 Nov 2021 18:54

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