Arthur, G. G. and McKeon, B. J. and Dearing, S. S. and Morrison, J. F. and Cui, Z. (2006) Manufacture of micro-sensors and actuators for flow control. Microelectronic Engineering, 83 (4-9). pp. 1205-1208. ISSN 0167-9317. doi:10.1016/j.mee.2006.01.171. https://resolver.caltech.edu/CaltechAUTHORS:20141008-165129047
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Abstract
The design, manufacture and testing of micro-sensors and -actuators for aerodynamic drag reduction by flow control is described. Key factors in the designs are discussed, for example, the type and shape of the actuator electrodes affect the critical parameters of frequency response and deflection amplitude. Some aspects of future work are also covered.
| Item Type: | Article | |||||||||
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| Contact Email Address: | mckeon@caltech.edu | |||||||||
| Additional Information: | Copyright © 2006 Elsevier. The authors acknowledge the Engineering and Physical Sciences Research Council, UK who supported this work under Grant No. GR/S20994, which was also part-funded by the Defence Science and Technology Laboratory through the Joint Grants Scheme. B.J. McKeon is grateful to the Royal Society for a Dorothy Hodgkin Fellowship. | |||||||||
| Group: | GALCIT | |||||||||
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| Subject Keywords: | MEMS; Airflow control; Electroactive polymers; EAPs; Pressure sensors; Micro-actuators | |||||||||
| Issue or Number: | 4-9 | |||||||||
| DOI: | 10.1016/j.mee.2006.01.171 | |||||||||
| Record Number: | CaltechAUTHORS:20141008-165129047 | |||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20141008-165129047 | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 50291 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | Jamie Sei | |||||||||
| Deposited On: | 09 Oct 2014 19:43 | |||||||||
| Last Modified: | 10 Nov 2021 18:54 |
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