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Simulation of sputtering following ion bombardment at a target step

Shapiro, M. H. and Tombrello, T. A. (2002) Simulation of sputtering following ion bombardment at a target step. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 194 (4). pp. 425-433. ISSN 0168-583X. doi:10.1016/S0168-583X(02)00949-7. https://resolver.caltech.edu/CaltechAUTHORS:20141020-090705568

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Abstract

Both binary-collision and molecular-dynamics simulations of sputtering properties usually are carried out using perfectly smooth targets. However, in actual sputtering experiments the target topography most often is not smooth. In this molecular-dynamics simulation study we investigate the effect that a simple step irregularity on the surface of a Cu(1 0 0) target has on sputtering properties such as yields, sputtered-atom energy distributions, and sputtered-atom angular distributions.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1016/S0168-583X(02)00949-7 DOIArticle
http://www.sciencedirect.com/science/article/pii/S0168583X02009497PublisherArticle
Additional Information:© 2002 Elsevier Science B. V. Received 7 December 2001: received in revised form 17 February 2002. Supported in part by the National Science Foundation (grants DMR-9712538 at Cal State Fullerton and DMR-9730893 at Caltech).
Funders:
Funding AgencyGrant Number
NSFDMR-9712538
NSFDMR-9730893
Subject Keywords:Sputtering; Sputtered atoms; Target step
Issue or Number:4
Classification Code:PACS: 79.20.−m; 79.20.Ap; 79.20.Rf
DOI:10.1016/S0168-583X(02)00949-7
Record Number:CaltechAUTHORS:20141020-090705568
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20141020-090705568
Official Citation:M.H. Shapiro, T.A. Tombrello, Simulation of sputtering following ion bombardment at a target step, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Volume 194, Issue 4, October 2002, Pages 425-433, ISSN 0168-583X, http://dx.doi.org/10.1016/S0168-583X(02)00949-7. (http://www.sciencedirect.com/science/article/pii/S0168583X02009497)
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:50530
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:20 Oct 2014 17:15
Last Modified:10 Nov 2021 18:57

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