Shapiro, M. H. and Tombrello, T. A. (2002) Simulation of sputtering following ion bombardment at a target step. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 194 (4). pp. 425-433. ISSN 0168-583X. doi:10.1016/S0168-583X(02)00949-7. https://resolver.caltech.edu/CaltechAUTHORS:20141020-090705568
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Abstract
Both binary-collision and molecular-dynamics simulations of sputtering properties usually are carried out using perfectly smooth targets. However, in actual sputtering experiments the target topography most often is not smooth. In this molecular-dynamics simulation study we investigate the effect that a simple step irregularity on the surface of a Cu(1 0 0) target has on sputtering properties such as yields, sputtered-atom energy distributions, and sputtered-atom angular distributions.
| Item Type: | Article | |||||||||
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| Additional Information: | © 2002 Elsevier Science B. V. Received 7 December 2001: received in revised form 17 February 2002. Supported in part by the National Science Foundation (grants DMR-9712538 at Cal State Fullerton and DMR-9730893 at Caltech). | |||||||||
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| Subject Keywords: | Sputtering; Sputtered atoms; Target step | |||||||||
| Issue or Number: | 4 | |||||||||
| Classification Code: | PACS: 79.20.−m; 79.20.Ap; 79.20.Rf | |||||||||
| DOI: | 10.1016/S0168-583X(02)00949-7 | |||||||||
| Record Number: | CaltechAUTHORS:20141020-090705568 | |||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20141020-090705568 | |||||||||
| Official Citation: | M.H. Shapiro, T.A. Tombrello, Simulation of sputtering following ion bombardment at a target step, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Volume 194, Issue 4, October 2002, Pages 425-433, ISSN 0168-583X, http://dx.doi.org/10.1016/S0168-583X(02)00949-7. (http://www.sciencedirect.com/science/article/pii/S0168583X02009497) | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 50530 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | Tony Diaz | |||||||||
| Deposited On: | 20 Oct 2014 17:15 | |||||||||
| Last Modified: | 10 Nov 2021 18:57 |
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