Shapiro, M. H. and Bengtson, K. R. and Tombrello, T. A. (1995) Molecular dynamics simulations of sputtering from liquid Ga-In targets. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 103 (2). pp. 123-130. ISSN 0168-583X. doi:10.1016/0168-583X(95)00612-5. https://resolver.caltech.edu/CaltechAUTHORS:20141020-101855446
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Abstract
We have used molecular dynamics (MD) simulation techniques to generate liquid Ga-In alloy targets, pure liquid gallium targets, and pure liquid indium targets for use in sputtering simulations. The sputtering simulations were carried out for normally incident 1.5 and 3.0 keV Ar^+ ions. Yields, energy distributions, and angular distributions of the sputtered atoms were obtained, along with information on the depth of origin of ejected atoms. Some limited results on the ejection of small clusters from these targets also were obtained. Our results are in good agreement with the experimental sputtering data of Dumke et al., Surf. Sci. 124 (1983) 407 [1] and Hubbard et al., Nucl. Instr. and Meth. B 36 (1989) 395 [2] for these systems. The simulations support their observations [1,2] that most of the ejected atoms originate in the topmost layer of the target.
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| Additional Information: | © 1995 Elsevier Science B.V. Received 3 March 1995; revised form received 25 April 1995. Supported in part by the National Science Foundation [Grants DMR90-02532 and DMR93-12468 at CSUF and Grant DMR93-18931 at Caltech]. | |||||||||
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| Issue or Number: | 2 | |||||||||
| DOI: | 10.1016/0168-583X(95)00612-5 | |||||||||
| Record Number: | CaltechAUTHORS:20141020-101855446 | |||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20141020-101855446 | |||||||||
| Official Citation: | M.H. Shapiro, K.R. Bengtson, T.A. Tombrello, Molecular dynamics simulations of sputtering from liquid GaIn targets, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Volume 103, Issue 2, October 1995, Pages 123-130, ISSN 0168-583X, http://dx.doi.org/10.1016/0168-583X(95)00612-5. (http://www.sciencedirect.com/science/article/pii/0168583X95006125) | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 50543 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | Tony Diaz | |||||||||
| Deposited On: | 20 Oct 2014 18:37 | |||||||||
| Last Modified: | 10 Nov 2021 18:57 |
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