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Molecular dynamics simulations of inelastic energy loss effects in sputtering

Shapiro, M. H. and Tombrello, T. A. (1994) Molecular dynamics simulations of inelastic energy loss effects in sputtering. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 90 (1-4). pp. 473-476. ISSN 0168-583X. https://resolver.caltech.edu/CaltechAUTHORS:20141020-124853019

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Abstract

Previous molecular dynamics (MD) simulations of inelastic energy loss effects in sputtering, which have employed pair potentials and velocity dependent losses, have attributed significant reductions in sputter yield (up to 40%) to energy losses in atom-atom collisions. Similar simulations, in which the average electron density is replaced by the local electron density as calculated from the embedded atom method (EAM) and Thomas-Fermi local densities, also yield significant inelastic energy losses in the collision cascade. We present a preliminary account of EAM MD inelastic energy loss simulations using both a velocity dependent model to account for losses from collisions with valence electrons only, and an instantaneous loss model to account for collisions with core electrons. With this model we find that losses attributable to collisions with valence electrons and atom-atom collisions involving core electrons produce negligible reductions in sputtering yield. If ion-atom collisions involving core electrons also are included, sputtering yield reductions comparable to the continuous loss model are observed. However, in contrast to the continuous loss model, angular distributions of sputtered atoms from the Cu(100) surface are affected by the inelastic losses.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1016/0168-583X(94)95596-4 DOIArticle
http://www.sciencedirect.com/science/article/pii/0168583X94955964PublisherArticle
Additional Information:© 1994 Elsevier Science B.V. Supported in part by NSF Grant DMR90-11230 at Caltech and by NSF Grant DMR90-02532 at CSUF.
Funders:
Funding AgencyGrant Number
NSFDMR90-11230
NSFDMR90-02532
Issue or Number:1-4
Record Number:CaltechAUTHORS:20141020-124853019
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20141020-124853019
Official Citation:M.H. Shapiro, T.A. Tombrello, Molecular dynamics simulations of inelastic energy loss effects in sputtering, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Volume 90, Issues 1–4, 2 May 1994, Pages 473-476, ISSN 0168-583X, http://dx.doi.org/10.1016/0168-583X(94)95596-4. (http://www.sciencedirect.com/science/article/pii/0168583X94955964)
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:50556
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:20 Oct 2014 20:01
Last Modified:03 Oct 2019 07:24

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