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Molecular dynamics simulations of inelastic energy loss effects in sputtering II

Shapiro, M. H. and Tombrello, T. A. (1994) Molecular dynamics simulations of inelastic energy loss effects in sputtering II. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 94 (3). pp. 186-196. ISSN 0168-583X. https://resolver.caltech.edu/CaltechAUTHORS:20141020-130513184

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Abstract

Previous molecular dynamics (MD) simulations of inelastic energy loss effects in sputtering, which have employed pair potentials and velocity-dependent losses, have attributed significant reductions in sputtering yield (up to 40%) to energy losses in atom-atom collisions. Similar simulations in which the average electron density is replaced by the local electron density as calculated from the embedded-atom method (EAM) and Thomas-Fermi local electron densities also yield significant inelastic energy losses in the collision cascade [A. Caro and M. Victoria, Phys. Rev. A 40 (1989) 2287]. Here we report results of EAM MD inelastic energy loss simulations for the Ar^+-Cu system for bombarding energies from 1 keV to 5 keV using a model that includes velocity-dependent losses for collisions with valence electrons and instantaneous losses for collisions involving core electrons. With this model we find that losses attributable to collisions with valence electrons and atom-atom collisions involving core electrons produce negligible reductions in sputtering yield. The inclusion of instantaneous losses from ion-atom collisions, however, produces significant reductions in sputtering yield above a bombarding energy threshold of approximately 2 keV. The polar-angle distributions of atoms sputtered from the Cu(100) surface also are changed significantly by this inelastic loss model.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1016/0168-583X(94)95353-8DOIArticle
http://www.sciencedirect.com/science/article/pii/0168583X94953538PublisherArticle
Additional Information:© 1994 Elsevier Science B.V. Received 24 January 1994; revised form received 8 July 1994. Supported in part by the National Science Foundation [Grants DMR90-02532 and DMR93-12468 at CSUF and Grant DMR93-18931 at Caltech).
Funders:
Funding AgencyGrant Number
NSFDMR90-02532
NSFDMR93-12468
NSFDMR93-18931
Issue or Number:3
Record Number:CaltechAUTHORS:20141020-130513184
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20141020-130513184
Official Citation:M.H. Shapiro, T.A. Tombrello, Molecular dynamics simulations of inelastic energy loss effects in sputtering II, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Volume 94, Issue 3, November 1994, Pages 186-196, ISSN 0168-583X, http://dx.doi.org/10.1016/0168-583X(94)95353-8. (http://www.sciencedirect.com/science/article/pii/0168583X94953538)
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:50557
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:20 Oct 2014 20:33
Last Modified:03 Oct 2019 07:24

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