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A time-of-flight detector for heavy ion RBS

Döbeli, M. and Haubert, P. C. and Livi, R. P. and Spicklemire, S. J. and Weathers, D. L. and Tombrello, T. A. (1991) A time-of-flight detector for heavy ion RBS. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 56-57 (2). pp. 764-767. ISSN 0168-583X. doi:10.1016/0168-583X(91)95022-6.

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We describe the details and performance of a time-of-flight (TOF) spectrometer for application in heavy ion RBS. An energy resolution of better than 1% is achieved for ^(16)O and ^(35)Cl ions in the energy range between 3 and 15 MeV. Using ions with a mass up to 45 amu as projectiles a mass resolution between 1 and 2 amu is obtained over the whole periodic table. At the sample surface a depth resolution of ∼ 1 μg/cm^2 can be achieved. The technique has been used to measure indium profiles in In GaAs/GaAs quantum well samples with a depth resolution of 2 nm, and to determine the arsenic loss in annealed GaAs samples. Further applications and improvements of the spectrometer will be discussed.

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Additional Information:© 1991 Elsevier Science Publishers B.V. Work supported in part by the National Science Foundation (DMR86-15641 and DMR88-11795). M.D. would like to express his gratitude towards the Swiss National Science Foundation for their financial support. We would like to thank Prof. M.A. Nicolet. Caltech and Prof. H. Morkoç, University of Illinois. Urbana, for the preparation of the GaAs samples.
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Swiss National Science Foundation (SNSF)UNSPECIFIED
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Record Number:CaltechAUTHORS:20141020-134808489
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Official Citation:M. Döbeli, P.C. Haubert, R.P. Livi, S.J. Spicklemire, D.L. Weathers, T.A. Tombrello, A time-of-flight detector for heavy ion RBS, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Volumes 56–57, Part 2, 1 May 1991, Pages 764-767, ISSN 0168-583X, (
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:50562
Deposited By: Tony Diaz
Deposited On:20 Oct 2014 21:27
Last Modified:10 Nov 2021 18:57

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