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The formation of clusters during large sputtering events

Hartman, John W. and Shapiro, Mark H. and Tombrello, T. A. (1997) The formation of clusters during large sputtering events. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 124 (1). pp. 31-39. ISSN 0168-583X. https://resolver.caltech.edu/CaltechAUTHORS:20141020-152221875

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Abstract

We present the results of simulations of cluster formation during Ar^+ → In-Ga (liquid) sputtering events. We find that the indium concentration in small k-atom clusters (k ≤ 4) reflects the concentration in the target at the depth from which the clusters were sputtered. We find a strong correlation between the production of clusters and the size of the events responsible for their production. A simple model for the recombination of uncorrelated emissions into small clusters accurately predicts the production of small k-clusters during events of size N to be Y_k(N) ∼ N_k. However, this uncorrelated recombination model does not predict the proper energy spectra for clusters nor does it predict the oft experimentally observed power law decay of the yield of clusters. We discuss how a model for the recombination of correlated emissions may more readily explain these features.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1016/S0168-583X(97)00073-6 DOIArticle
http://www.sciencedirect.com/science/article/pii/S0168583X97000736PublisherArticle
Additional Information:© 1997 Elsevier Science B.V. Received 14 October 1996. This work was supported in part by the Lawrence Livermore National Laboratory under subcontract B295137 of DOE contract W-7405-ENG-48, and by National Science Foundation grant DMR93-12468 at CSUF.
Funders:
Funding AgencyGrant Number
Lawrence Livermore National Laboratory (LLNL)B295137
Department of Energy (DOE)W-7405-ENG-48
NSFDMR93-12468
Issue or Number:1
Record Number:CaltechAUTHORS:20141020-152221875
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20141020-152221875
Official Citation:John W. Hartman, Mark H. Shapiro, T.A. Tombrello, The formation of clusters during large sputtering events, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Volume 124, Issue 1, 1 April 1997, Pages 31-39, ISSN 0168-583X, http://dx.doi.org/10.1016/S0168-583X(97)00073-6. (http://www.sciencedirect.com/science/article/pii/S0168583X97000736)
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:50576
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:21 Oct 2014 15:44
Last Modified:03 Oct 2019 07:24

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