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Molecular dynamics simulation of nonlinear effects in sputtering — Cu(100) targets

Shapiro, M. H. and Tombrello, T. A. (1990) Molecular dynamics simulation of nonlinear effects in sputtering — Cu(100) targets. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 48 (1-4). pp. 557-561. ISSN 0168-583X. https://resolver.caltech.edu/CaltechAUTHORS:20141021-135529785

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Abstract

Nonlinear effects in sputtering from Cu(100) targets have been simulated with the multiple-interaction molecular dynamics code SPUT2. Both dimer and single-ion impacts were studied for Ar, Cu, Kr, and Xe ions normally incident on Cu(100) with energies of 5 keV/atom. Statistically significant nonlinear yields were found for bombardment with Kr and Xe dimers, but not for Ar and Cu dimer bombardment. Even for those cases not exhibiting nonlinearities in yield, differences were found in the energy and angular distributions of sputtered atoms for dimer impacts compared to the sum of individual ion impacts. For both dimer and single-ion impacts most sputtering was found to occur within 200 fs of impact; however, atom ejection tended to be shifted to later times for dimer impacts. Likewise, energy degradation in the collision cascades was much slower for dimer impacts than for single-ion impacts. These results suggest that a thermal spike begins to develop relatively early in collision cascades initiated by dimer impacts on Cu. This developing spike together with collisional disruption of the surface contributes to the excess yield found with dimer impacts.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1016/0168-583X(90)90182-T DOIArticle
http://www.sciencedirect.com/science/article/pii/0168583X9090182TPublisherArticle
Additional Information:© 1990 Elsevier Science Publishers B.V. Supported in part by NSF Grant DMR86-15641 at Caltech.
Funders:
Funding AgencyGrant Number
NSFDMR86-15641
Issue or Number:1-4
Record Number:CaltechAUTHORS:20141021-135529785
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20141021-135529785
Official Citation:M.H. Shapiro, T.A. Tombrello, Molecular dynamics simulation of nonlinear effects in sputtering — Cu(100) targets, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Volume 48, Issues 1–4, 2 March 1990, Pages 557-561, ISSN 0168-583X, http://dx.doi.org/10.1016/0168-583X(90)90182-T. (http://www.sciencedirect.com/science/article/pii/0168583X9090182T)
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:50627
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:21 Oct 2014 21:29
Last Modified:03 Oct 2019 07:25

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