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Low-energy electron detection with delta-doped CCDs

Nikzad, Shouleh and Smith, Aimée L. and Elliott, S. Tom and Jones, Todd J. and Tombrello, T. A. and Yu, Q. (1997) Low-energy electron detection with delta-doped CCDs. In: Solid State Sensor Arrays: Development and Applications. Proceedings of the SPIE. No.3019. SPIE , Bellingham, WA, pp. 241-248. ISBN 0-8194-2430-7. https://resolver.caltech.edu/CaltechAUTHORS:20141028-144338061

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Abstract

Delta-doped CCDs have achieved stable quantum efficiency, at the theoretical limit imposed by reflection from the Si surface in the near UV and visible. In this approach, an epitaxial silicon layer is grown on a fully-processed CCD using molecular beam epitaxy. During the silicon growth on the CCD, 30 percent of a monolayer of boron atoms are deposited nominally within a single atomic layer, resulting in the effective elimination of the backside potential well. In this paper, we will briefly discuss delta-doped CCDs and their application of low-energy electron detection. We show that modification of the surface this way can greatly improve sensitivity to low-energy detection. We show that modification of the surface this way can greatly improve sensitivity to low-energy electrons. Measurements comparing the response of delta-doped CCDs with untreated CCDs were made in the 50 eV-1.5 keV energy range.For electrons with energies below 300 eV, the signal from untreated CCDs was below the detection limit for our apparatus, and data are presented only for the response of delta-doped CCDs at these energies. The effects of multiple electron hole pair production and backscattering on the observed signals are discussed.


Item Type:Book Section
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http://dx.doi.org/10.1117/12.275183DOIArticle
Additional Information:© 1997 SPIE. The authors gratefully acknowledge the invaluable assistance of Ors., L. Douglas Bell, Michael Hoenk, Steve Manion, Tom Van Zandt, Mr. Walter Proniawicz, and Professor L.C. Kimerling. The work presented in this paper was performed by the Center for Space Microelectronics Technology, Jet Propulsion Laboratory, California Institute of Technology, and was jointly funded by the Caltech President's fund and the NASA Office of Space Science.
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Caltech President’s FundUNSPECIFIED
NASAUNSPECIFIED
Series Name:Proceedings of the SPIE
Issue or Number:3019
Record Number:CaltechAUTHORS:20141028-144338061
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20141028-144338061
Official Citation:Shouleh Nikzad ; Aimee Smith ; Tom S. Elliott ; Todd J. Jones ; T. A. Tombrello, et al. "Low-energy electron detection with delta-doped CCDs", Proc. SPIE 3019, Solid State Sensor Arrays: Development and Applications, 241 (April 25, 1997); doi:10.1117/12.275183; http://dx.doi.org/10.1117/12.275183
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:50955
Collection:CaltechAUTHORS
Deposited By: Ruth Sustaita
Deposited On:28 Oct 2014 22:10
Last Modified:23 Nov 2020 19:57

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