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Simulation of isotopic mass effects in sputtering, II

Shapiro, M. H. and Tombrello, T. A. and Harrison, Don E., Jr. (1988) Simulation of isotopic mass effects in sputtering, II. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 30 (2). pp. 152-158. ISSN 0168-583X. http://resolver.caltech.edu/CaltechAUTHORS:20141029-132243837

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Abstract

We have reinvestigated isotope effects in sputtering from the Ar^+−Cu and the Ar^+-pseudo-Cu systems using the multiple-interaction (MI) simulation technique with a target generator that maintains a fixed ratio of light to heavy atoms. A new target configuration was generated prior to the simulation of each impact. The changes in target generation technique were made in response to a suggestion by Sigmund that the results of a previous simulation study of this problem may have included large systematic errors. In this study targets with equal numbers of light and heavy atoms were generated. Mass differences ranged from 3% to 20%. The sputtered material generally was found to be enriched in the light isotope. This enrichment was greatest for material ejected near the normal to the target surface. Our present results are in good agreement with our previous simulations and with the experimental results of Gnaser et al.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1016/0168-583X(88)90111-5DOIArticle
http://www.sciencedirect.com/science/article/pii/0168583X88901115PublisherArticle
Additional Information:© 1988 Elsevier B.V. Received 3 August 1987 and in revised form 2 November 1987. Supported in part by the US National Science Foundation DMR83-06541 and DMR86-15641 at Caltech, DMR83-06546 at CSUF).
Funders:
Funding AgencyGrant Number
NSFDMR83-06541
NSFDMR86-15641
NSFDMR83-06546
Record Number:CaltechAUTHORS:20141029-132243837
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20141029-132243837
Official Citation:Shapiro, M. H., Tombrello, T. A., & Harrison Jr, D. E. (1988). Simulation of isotopic mass effects in sputtering, II. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 30(2), 152-158. doi: http://dx.doi.org/10.1016/0168-583X(88)90111-5
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:51016
Collection:CaltechAUTHORS
Deposited By: Jason Perez
Deposited On:29 Oct 2014 23:10
Last Modified:29 Oct 2014 23:10

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