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Simulation of sputtering from liquid Cu targets

Shapiro, M. H. and Lo, D. Y. and Haff, P. K. and Tombrello, T. A. (1986) Simulation of sputtering from liquid Cu targets. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 13 (1-3). pp. 348-352. ISSN 0168-583X. http://resolver.caltech.edu/CaltechAUTHORS:20141029-132436484

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Abstract

The sputtering of Cu atoms from liquid targets by normally incident 5 keV Ar^+ ions was simulated using the multiple interaction molecular dynamics technique. Yields, energy distributions, and angular distributions of sputtered atoms were obtained at several temperatures slightly above and below the experimental melting point of copper. In all cases the resulting angular distributions of ejected atoms peaked more sharply than the cos θ behavior predicted by linear cascade theory. The ratio of yields from individual layers of the liquid targets, and the energy and angular distributions of ejected atoms generally were found to be similar to those obtained in previous simulations with solid Cu targets. Our results also are in qualitative agreement with Dumke's measurements of angular distributions and layer yield ratios of sputtered atoms from liquid Ga-In eutectic alloy targets. In particular, no marked changes in yields or energy distributions were observed when the temperature of the target was lowered below the nominal melting point of copper. The angular distributions were found to broaden with increasing temperature.


Item Type:Article
Related URLs:
URLURL TypeDescription
http:dx.doi.org/10.1016/0168-583X(86)90525-2DOIArticle
http://www.sciencedirect.com/science/article/pii/0168583X86905252PublisherArticle
Additional Information:© 1986 Elsevier B.V. Supported in part by the National Science Foundation [DMR83-06541 (Caltech) and DMR83-06548 (CSUF)], the Alexander von Humbolt Foundation, and Schlumberger-Doll Research.
Funders:
Funding AgencyGrant Number
NSFDMR83-06541
NSFDMR83-06548
Alexander von Humbolt FoundationUNSPECIFIED
Schlumberger-Doll ResearchUNSPECIFIED
Record Number:CaltechAUTHORS:20141029-132436484
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20141029-132436484
Official Citation:Shapiro, M. H., Lo, D. Y., Haff, P. K., & Tombrello, T. A. (1986). Simulation of sputtering from liquid Cu targets. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 13(1–3), 348-352. doi: http://dx.doi.org/10.1016/0168-583X(86)90525-2
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:51018
Collection:CaltechAUTHORS
Deposited By: Jason Perez
Deposited On:29 Oct 2014 21:32
Last Modified:29 Oct 2014 21:32

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