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Indium profiles in InGaAs with heavy ion RBS

Döbeli, M. and Haubert, P. C. and Tombrello, T. A. and Chyi, J.-I. and Huang, D. and Morkoç, H. (1990) Indium profiles in InGaAs with heavy ion RBS. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 52 (1). pp. 72-78. ISSN 0168-583X. https://resolver.caltech.edu/CaltechAUTHORS:20141029-140713882

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Abstract

The indium profile of MBE-grown In_xGa_(1−x)As/GaAs single quantum well structures and In_xGa_(1−x)As layers on InAlAs buffer layers have been measured with heavy ion Rutherford backscattering using a time-of-flight detector. The depth resolution of the method is better than 30 Å at the sample surface using 15 MeV ^(35)Cl ions. The results for the average indium molar fraction are compared with photo reflectance measurements. The aluminum molar fraction in the InAlAs buffer layer has been profiled by nuclear reaction analysis.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://www.sciencedirect.com/science/article/pii/0168583X9090604SPublisherArticle
http://dx.doi.org/10.1016/0168-583X(90)90604-SDOIArticle
Additional Information:© 1990 Elsevier Science Publishers B.V. Received 24 may 1990. Supported in part by the National Science Foundation (DMR88-11795). Supported in part by a fellowship from the Swiss National Science Foundation. M. Döbeli would like to express his gratitude towards the Swiss National Science Foundation for their financial support.
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Funding AgencyGrant Number
NSFDMR88-11795
Swiss National Science Foundation (SNSF)UNSPECIFIED
Issue or Number:1
Record Number:CaltechAUTHORS:20141029-140713882
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20141029-140713882
Official Citation:M. Döbeli, P.C. Haubert, T.A. Tombrello, J.-I. Chyi, D. Huang, H. Morkoç, Indium profiles in InGaAs with heavy ion RBS, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Volume 52, Issue 1, November 1990, Pages 72-78, ISSN 0168-583X, http://dx.doi.org/10.1016/0168-583X(90)90604-S. (http://www.sciencedirect.com/science/article/pii/0168583X9090604S)
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:51024
Collection:CaltechAUTHORS
Deposited By: Ruth Sustaita
Deposited On:29 Oct 2014 21:21
Last Modified:03 Oct 2019 07:29

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