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Heavy ion backscattering analysis with a time-of-flight detector

Döbeli, M. and Haubert, P. C. and Livi, R. P. and Spicklemire, S. J. and Weathers, D. L. and Tombrello, T. A. (1990) Heavy ion backscattering analysis with a time-of-flight detector. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 47 (2). pp. 148-154. ISSN 0168-583X. https://resolver.caltech.edu/CaltechAUTHORS:20141031-085741141

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Abstract

We describe a time-of-flight spectrometer for heavy ion RBS. Start and stop signals for the flight time measurement are obtained by detecting the secondary electrons emitted from two thin foils traversed by the ions. MicroChannel plates are used to provide very fast timing signals. The achieved energy resolution of the system is 30 keV (FWHM) at 2 MeV and 75 keV at 10 MeV for ^(35)Cl, which permits a depth resolution of approximately 100 Å for indium profiles in GaAs (normal beam incidence). For ^(16)O the energy resolution is 45 keV at 6 MeV and 110 keV at 12 MeV. We present RBS spectra of thin-layer multielement targets. As possible applications we show indium profiles in In_xGa_(1−x)As heterostructures, As and Ga profiles in a thin layer GaAs sample and a measurement of the silver isotopic ratio in a sputtering experiment.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1016/0168-583X(90)90023-N DOIArticle
http://www.sciencedirect.com/science/article/pii/0168583X9090023NPublisherArticle
Additional Information:© 1990 Elsevier Science Publishers B.V. Received 30 August 1989 and in revised form 31 October 1989. Supported in part by the National Science Foundation [DMR86-15641 and DMR88-11795]. Supported in part by a fellowship from the Swiss National Science Foundation. We would like to thank Prof. H. Morkoç, University of Illinois, Urbana, and Prof. M.A. Nicolet, Caltech, for the preparation of the GaAs samples as well as Alan Rice and Steve Stryker for their help in building the spectrometer and running the tandem accelerator. M. Döbeli is indebted to the Swiss National Science Foundation for their financial support.
Funders:
Funding AgencyGrant Number
Swiss National Science Foundation (SNSF)UNSPECIFIED
NSFDMR86-15641
NSFDMR88-11795
Issue or Number:2
Record Number:CaltechAUTHORS:20141031-085741141
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20141031-085741141
Official Citation:M. Döbeli, P.C. Haubert, R.P. Livi, S.J. Spicklemire, D.L. Weathers, T.A. Tombrello, Heavy ion backscattering analysis with a time-of-flight detector, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Volume 47, Issue 2, 1 April 1990, Pages 148-154, ISSN 0168-583X, http://dx.doi.org/10.1016/0168-583X(90)90023-N. (http://www.sciencedirect.com/science/article/pii/0168583X9090023N)
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:51104
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:31 Oct 2014 16:06
Last Modified:03 Oct 2019 07:29

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