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Sputtering from a liquid Ga-In eutectic alloy

Hubbard, Kevin M. and Weller, Robert A. and Weathers, Duncan L. and Tombrello, T. A. (1989) Sputtering from a liquid Ga-In eutectic alloy. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 40-41 (1). pp. 278-281. ISSN 0168-583X. http://resolver.caltech.edu/CaltechAUTHORS:20141031-091947859

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Abstract

Angular distributions of Ga and In atoms sputtered from a liquid Ga-In eutectic alloy target have been measured for 3, 25, and 50 keV Ar^+ bombardment. Although the bulk composition of the alloy is 16.5 at.% In, thermodynamic surface segregation results in a surface monolayer of > 94 at.% In. A comparison of the measured sputtered-flux composition with the alloy surface composition profile indicates that the fraction of sputtered atoms originating in the first atomic layer, F_1, is ≈ 0.87 at 25 and 50 keV, and increases to 0.94 at 3 keV. Measurements of the secondary-ion flux for 25–250 keV Ar^+ bombardment indicate that F_1 is independent of projectile energy up to 250 keV, in agreement with the predictions of the collision-cascade model. The increase observed at 3 keV may be the result of a decrease in the average energy of recoil atoms participating in the collision cascades.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1016/0168-583X(89)90978-6DOIArticle
http://www.sciencedirect.com/science/article/pii/0168583X89909786PublisherArticle
Additional Information:© 1989 Published by Elsevier B.V. We thank L.M. Baumel, M.G. Kaurin, A. Rice and P.D. Parker for their assistance, and D.A. Bromley for his continued interest and support. Work supported in part by US DOE Contract: DE-AC02-76ER03074 and a Cottrell Research grant from the Research Corporation. Supported in part by the NSF [DMR86-15641].
Funders:
Funding AgencyGrant Number
Department of Energy (DOE)DE-AC02- 76ER03074
Research Coroporation Cottrell Research grantUNSPECIFIED
NSFDMR86-15641
Record Number:CaltechAUTHORS:20141031-091947859
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20141031-091947859
Official Citation:Hubbard, K. M., Weller, R. A., Weathers, D. L., & Tombrello, T. A. (1989). Sputtering from a liquid Ga-In eutectic alloy. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 40–41, Part 1(0), 278-281. doi: http://dx.doi.org/10.1016/0168-583X(89)90978-6
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:51106
Collection:CaltechAUTHORS
Deposited By: Jason Perez
Deposited On:31 Oct 2014 18:54
Last Modified:31 Oct 2014 18:54

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