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A new technique for measuring sputtering yields at high energies

Qiu, Yuanxun and Griffith, J. E. and Tombrello, T. A. (1984) A new technique for measuring sputtering yields at high energies. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1 (1). pp. 118-122. ISSN 0168-583X. https://resolver.caltech.edu/CaltechAUTHORS:20141031-092257454

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Abstract

The use of thin, self-supporting carbon catcher foils allows one to measure sputtering yields in a broad range of materials with high sensitivity. Analyzing the foils with Rutherford forward scattering, we have measured sputtered Al, Si and P surface densities down to 5 × 10^(13) with uncertainties of about 20%.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1016/0168-583X(84)90483-XDOIArticle
http://www.sciencedirect.com/science/article/pii/0168583X8490483XPublisherArticle
Additional Information:© 1984 Published by Elsevier B.V. Received 5 August 1982 and in revised form 12 July 1983. Some preliminary experiments were skillfully executed by A. Anderson as a part of an undergraduate summer research project. We thank R. Miles, Wen Jin Meng, S. Trentalange and M. H. Mendenhall for their assistance. Supported in part by the National Science Foundation [PHY79-23638] and the National Aeronautics and Space Administration [AGW-202 and -148].
Funders:
Funding AgencyGrant Number
NSFPHY79-23638
NASAAGW-202
NASAAGW-148
Issue or Number:1
Record Number:CaltechAUTHORS:20141031-092257454
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20141031-092257454
Official Citation:Qiu, Y., Griffith, I. E., & Tombrello, T. A. (1984). A new technique for measuring sputtering yields at high energies. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1(1), 118-122. doi: http://dx.doi.org/10.1016/0168-583X(84)90483-X
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:51109
Collection:CaltechAUTHORS
Deposited By: Jason Perez
Deposited On:31 Oct 2014 18:32
Last Modified:03 Oct 2019 07:29

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