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Electronic-excitation mechanism in sputtering induced by high density electronic excitation

Itoh, Noriaki and Nakayama, Takeyoshi and Tombrello, T. A. (1985) Electronic-excitation mechanism in sputtering induced by high density electronic excitation. Physics Letters A, 108A (9). pp. 480-484. ISSN 0375-9601. http://resolver.caltech.edu/CaltechAUTHORS:20141031-151119774

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Abstract

On the basis of the assumption that two holes are attractive in a dense electron-hole plasma near the surface because of the Anderson negative-U interaction, the yield of laser- and ion-induced sputtering in the electronic excitation regime was calculated as a function of electron-hole concentration in a plasma. It is found that the model gives an order-of-magnitude account of the yields of these two sputtering processes.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://www.sciencedirect.com/science/article/pii/0375960185900453PublisherArticle
http://dx.doi.org/10.1016/0375-9601(85)90045-3DOIArticle
Additional Information:© 1985 Elsevier Science Publishers B.V. Received 10 December 1984; revised manuscript received 13 February 1985; accepted for publication 13 February 1985. Available online 10 September 2002. Supported in part by the Grant-in-Aid for Scientific Research of the Ministry of Education, Science and Culture and the National Science Foundation [DMR83-18274] and Schlumberger-Doll Research.
Funders:
Funding AgencyGrant Number
Grant-in-Aid for Scientific Research of the Ministry of Education, Science and CultureUNSPECIFIED
NSFDMR83-18274
Schlumberger-Doll ResearchUNSPECIFIED
Record Number:CaltechAUTHORS:20141031-151119774
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20141031-151119774
Official Citation:Noriaki Itoh, Takeyoshi Nakayama, T.A. Tombrello, Electronic-excitation mechanism in sputtering induced by high density electronic excitation, Physics Letters A, Volume 108, Issue 9, 29 April 1985, Pages 480-484, ISSN 0375-9601, http://dx.doi.org/10.1016/0375-9601(85)90045-3. (http://www.sciencedirect.com/science/article/pii/0375960185900453)
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:51141
Collection:CaltechAUTHORS
Deposited By: Ruth Sustaita
Deposited On:31 Oct 2014 22:44
Last Modified:31 Oct 2014 22:44

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