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Energy cost to sputter an atom from a surface in keV ion bombardment processes

Garrison, B. J. and Winograd, N. and Lo, D. and Tombrello, T. A. and Shapiro, M. H. and Harrison, D. E., Jr. (1987) Energy cost to sputter an atom from a surface in keV ion bombardment processes. Surface Science, 180 (2-3). L129-L133. ISSN 0039-6028. https://resolver.caltech.edu/CaltechAUTHORS:20141103-071903427

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Abstract

We propose that the energy cost to remove one atom from the surface during ion bombard-ment is larger than the surface binding energy or bulk heat of sublimation. It is this value of the energy cost that is appropriate for use in analytic models of the sputtering process.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://www.sciencedirect.com/science/article/pii/0039602887902123PublisherArticle
http://dx.doi.org/10.1016/0039-6028(87)90212-3DOIArticle
Additional Information:© 1987 Elsevier Science Publishers B.V. Received 23 September 1986; accepted for publication 16 October 1986. Available online 5 September 2002. The authors would like to acknowledge their respective National Science Foundation grants. D.E.H. thanks the Foundation Research Program of the Naval Postgraduate School and B.J.G. appreciates support from the IBM Corporation and the Camille and Henry Dreyfus Foundation. Helpful comments were received from R. Kelly.
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Funding AgencyGrant Number
NSFUNSPECIFIED
Naval Postgraduate School Foundation Research ProgramUNSPECIFIED
IBM CorporationUNSPECIFIED
Camille and Henry Dreyfus FoundationUNSPECIFIED
Issue or Number:2-3
Record Number:CaltechAUTHORS:20141103-071903427
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20141103-071903427
Official Citation:B.J. Garrison, N. Winograd, D. Lo, T.A. Tombrello, M.H. Shapiro, D.E. Harrison Jr., Energy cost to sputter an atom from a surface in keV ion bombardment processes, Surface Science, Volume 180, Issues 2–3, 2 February 1987, Pages L129-L133, ISSN 0039-6028, http://dx.doi.org/10.1016/0039-6028(87)90212-3. (http://www.sciencedirect.com/science/article/pii/0039602887902123)
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:51148
Collection:CaltechAUTHORS
Deposited By: Ruth Sustaita
Deposited On:03 Nov 2014 20:48
Last Modified:03 Oct 2019 07:30

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