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Surface modification using MeV ion beams

Tombrello, T. A. (1983) Surface modification using MeV ion beams. Nuclear Instruments and Methods in Physics Research, 218 (1-3). pp. 679-683. ISSN 0167-5087. https://resolver.caltech.edu/CaltechAUTHORS:20141103-154410873

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Abstract

Electronic excitation induced by MeV/amu ion beams in a variety of materials has been employed successfully for a number of applications. The examples that will be presented are: modification of the surface reflectivities of optical material; sputter-erosion of dielectrics; and enhancement of the adhesion of thin film coatings. All of these effects arise from the loss energy by the ion beam to electrons in the target material; the mechanisms involved are at best qualitatively understood. This paper will stress not only the exploitation of such high energy bombardment techniques but will also briefly review attempts to expose the underlying causes.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1016/0167-5087(83)91064-5DOIArticle
http://www.sciencedirect.com/science/article/pii/0167508783910645PublisherArticle
Additional Information:© 1983 Published by Elsevier B.V. The author wishes to acknowledge the use of previously unpublished data from his work with M.H. Mendenhall, Y. Qiu and J.E. Griffith. Supported in part by the NSF [CHE81-13272 and PHY79-23638], NASA [NAGW-202], the Caltech President's Fund, IBM Corp., and IRT Corp.
Funders:
Funding AgencyGrant Number
NSFCHE81-13272
NSFPHY79- 23638
NASANAGW-202
Caltech President’s FundUNSPECIFIED
IBM Corp.UNSPECIFIED
IRT Corp.UNSPECIFIED
Issue or Number:1-3
Record Number:CaltechAUTHORS:20141103-154410873
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20141103-154410873
Official Citation:Tombrello, T. A. (1983). Surface modification using MeV ion beams. Nuclear Instruments and Methods in Physics Research, 218(1–3), 679-683. doi: http://dx.doi.org/10.1016/0167-5087(83)91064-5
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:51205
Collection:CaltechAUTHORS
Deposited By: Jason Perez
Deposited On:04 Nov 2014 00:06
Last Modified:03 Oct 2019 07:30

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