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Sticking probabilities for sputtered Ag and Au atoms incident on oxidized aluminum surfaces

Weller, Martha Riherd and Hubbard, Kevin M. and Weller, Robert A. and Weathers, Duncan L. and Tombrello, T. A. (1989) Sticking probabilities for sputtered Ag and Au atoms incident on oxidized aluminum surfaces. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 42 (1). pp. 19-28. ISSN 0168-583X. http://resolver.caltech.edu/CaltechAUTHORS:20141104-114413191

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Abstract

We have measured the sticking probabilities for sputtered Ag and Au atoms incident on oxidized aluminum surfaces as a function of the areal density of deposited atoms. For Ag sputtered by 200 keV Ar ions, we found a sticking probability at zero coverage of k(0) = 0.46 ± 0.20. For very high coverages, we found k(n > 10^(17)at./cm^2) = 0.80 ± 0.20. For Au sputtered by 200 keV Ar ions, w found k(0) = 0.92 ± 0.08 and k(n > 10^(17)at./cm^2) = 0.80 ± 0.03. For Au sputtered by 200 keV Xe ions, values of k(0) = 0.98 ± and k(n > 10^(17)at./cm^2) = 0.89 ± 0.03 were obtained. In all cases, the sticking probability varied noticeably for densities between o and twenty monolayers. For Au, a maximum value near 1 was observed in this region while for Ag, the sticking probability exhibited a minimum of approximately 35%. Some possible explanations for these results are offered and the implications for collection-type sputtering experiments are discussed.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://www.sciencedirect.com/science/article/pii/0168583X89900050PublisherArticle
http://dx.doi.org/10.1016/0168-583X(89)90005-0DOIArticle
Additional Information:© 1989 Elsevier Science Publishers B.V. Received 19 September 1988 and in revised form 5 January 1989. Available online 11 October 2002. Supported in part by U.S.D.O.E. Contract No. DEAC02-76ER03074 and a Cottrell Research Grant from the Research Corporation at Yale and by the National Science Foundation [DMR 86-15641] at Caltech. The authors gratefully acknowledge the assistance of L. Baumel and M. Kaurin with the sputtering runs. We are also grateful to P. Miller, P. Pepmiller and M.T. Robinson for several very helpful conversations during a related measurement at Oak Ridge National Laboratory.
Funders:
Funding AgencyGrant Number
Department of Energy (DOE)DEAC02-76ER03074
Research Corporation Cottrell FellowshipUNSPECIFIED
NSFDMR 86-15641
Record Number:CaltechAUTHORS:20141104-114413191
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20141104-114413191
Official Citation:Martha Riherd Weller, Kevin M. Hhubbrd, Robert A. Weller, Duncan L. Weathers, T.A. Tombrello, Sticking probabilities for sputtered Ag AND Au atoms incident on oxidized aluminum surfaces, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Volume 42, Issue 1, May 1989, Pages 19-28, ISSN 0168-583X, http://dx.doi.org/10.1016/0168-583X(89)90005-0. (http://www.sciencedirect.com/science/article/pii/0168583X89900050)
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:51235
Collection:CaltechAUTHORS
Deposited By: Ruth Sustaita
Deposited On:04 Nov 2014 21:37
Last Modified:04 Nov 2014 21:37

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