Hubbard, Kevin M. and Weller, Robert A. and Weathers, Duncan L. and Tombrello, T. A. (1989) The angular distribution of atoms sputtered from a Ga-In eutectic alloy target. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 36 (4). pp. 395-403. ISSN 0168-583X. doi:10.1016/0168-583X(89)90342-X. https://resolver.caltech.edu/CaltechAUTHORS:20141104-120840694
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Abstract
Angular distributions of sputtered atoms have been obtained for 3, 25, and 50 keV Ar+ bombardment of a liquid Ga-In eutectic alloy target. Sputtered material was collected on graphite foils which were subsequently analyzed by Rutherford backscattering spectroscopy, and the resulting distributions were fit by a functional form, N (θ) α. cos^nθ. For each energy, the angular distribution of sputtered In atoms was overcosine, with n_(In) ≈ 1.8 ±0.1. The distributions of the sputtered Ga atoms were sharper, varying from n_(Ga) ≈ 3.2 ± 0.2 at 25 and 50 keV, to n_(Ga) = 4.9 ± 0.3 at 3 keV. A comparison of the sputtered flux composition with the alloy surface composition profile gives F_1, the fraction of sputtered atoms originating from the first atomic layer. The fraction was found to be f_1 = 0.87 ± 0.01 for 25 and 50 keV bombardment, and increased to 0.94 ± 0.01 at 3 keV. The variations of n_(ga), and F_1 with projectile energy may be the result of a decrease in the average recoil-atom energy for the 3 keV bombardment. The large values found for F_1 support a prediction that the sputtered-atom escape depth is determined by the elastic-collision mean free path of recoil atoms.
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| Additional Information: | © 1989 Elsevier Science Publishers B.V. Received 23 August 1988 and in revised form 30 October 1988. Available online 17 October 2002. Work supported in part by USDOE Contract No. DEAC02-76ER03074 and a Cottrell Research Grant from the Research Corporation. Supported in part by the NSF [DMR86-15641). We thank Peter Parker for his review of the manuscript. We also thank Alan Rice, Laurie Baumel, and Michael Kaurin for their assistance during the experiments, and D.A. Bromley for his continued interest and support. | |||||||||
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| Issue or Number: | 4 | |||||||||
| DOI: | 10.1016/0168-583X(89)90342-X | |||||||||
| Record Number: | CaltechAUTHORS:20141104-120840694 | |||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20141104-120840694 | |||||||||
| Official Citation: | Kevin M. Hubbard, Robert A. Weller, Duncan L. Weathers, T.A. Tombrello, The angular distribution of atoms sputtered from a GaIn eutectic alloy target, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Volume 36, Issue 4, 1 April 1989, Pages 395-403, ISSN 0168-583X, http://dx.doi.org/10.1016/0168-583X(89)90342-X. (http://www.sciencedirect.com/science/article/pii/0168583X8990342X) | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 51236 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | Ruth Sustaita | |||||||||
| Deposited On: | 04 Nov 2014 21:45 | |||||||||
| Last Modified: | 10 Nov 2021 19:07 |
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