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The sputtering of insulating materials by fast heavy ions

Seiberling, L. E. and Meins, C. K. and Cooper, B. H. and Griffith, J. E. and Mendenhall, M. H. and Tombrello, T. A. (1982) The sputtering of insulating materials by fast heavy ions. Nuclear Instruments and Methods in Physics Research, 198 (1). pp. 17-26. ISSN 0167-5087. https://resolver.caltech.edu/CaltechAUTHORS:20141104-153830338

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Abstract

In this paper we review recent experimental results from our laboratory on sputtering of UF_4 and H_2O (ice) by fast heavy ions. Measurements have been made of the dependence of the sputtering yield on the incident ion type, charge state and energy. In the case of UF_4 the energy spectra of neutral sputtered particles have been obtained as well. There is a clear dependence of the sputtering yield on the electronic part of the stopping power, and the yield is strongly affected by the charge state of the incident ion, which shows that in the near-surface region from which sputtered particles arise the charge state of the incident ion has not reached equilibrium. The shape of the energy spectra observed for UF_4 targets is that expected from a thermal distribution rather than that of the collision cascade from typical of ordinary sputtering. A model of the sputtering-track registration process that has arisen from these data is shown to provide a framework for understanding the close relationship of our observations to the “plasma desorption” of macromolecules.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://www.sciencedirect.com/science/article/pii/016750878290045XPublisherArticle
http://dx.doi.org/10.1016/0167-5087(82)90045-XDOIArticle
Additional Information:© 1982 Published by Elsevier B.V. Supported in part by the National Aeronautics and Space Administration [NGR05-002-333, NAGW-148], the National Science Foundation [PHY79-23638], and the Caltech President's Fund. The authors would like to thank the people whose diverse ideas and enthusiasm have stimulated many of the investigations in this paper. Among them are D. Burnett, P. Duck, R. Fleischer, R. Macfarlane, B. Sundqvist, and H. Voit.
Funders:
Funding AgencyGrant Number
NASANGR05-002-333
NASANAGW-148
NSFPHY79-23638
Caltech President’s FundUNSPECIFIED
Issue or Number:1
Record Number:CaltechAUTHORS:20141104-153830338
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20141104-153830338
Official Citation:L.E. Seiberling, C.K. Meins, B.H. Cooper, J.E. Griffith, M.H. Mendenhall, T.A. Tombrello, The sputtering of insulating materials by fast heavy ions, Nuclear Instruments and Methods in Physics Research, Volume 198, Issue 1, 1 July 1982, Pages 17-25, ISSN 0167-5087, http://dx.doi.org/10.1016/0167-5087(82)90045-X. (http://www.sciencedirect.com/science/article/pii/016750878290045X)
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:51259
Collection:CaltechAUTHORS
Deposited By: Ruth Sustaita
Deposited On:05 Nov 2014 00:10
Last Modified:03 Oct 2019 07:31

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