Kozinsky, I. and Postma, H. W. Ch. and Bargatin, I. and Roukes, M. L. (2006) Tuning nonlinearity, dynamic range, and frequency of nanomechanical resonators. Applied Physics Letters, 88 (25). Art. No. 253101. ISSN 0003-6951. doi:10.1063/1.2209211. https://resolver.caltech.edu/CaltechAUTHORS:KOZapl06
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Abstract
We explore an electrostatic mechanism for tuning the nonlinearity of nanomechanical resonators and increasing their dynamic range for sensor applications. We also demonstrate tuning the resonant frequency of resonators both upward and downward. A theoretical model is developed that qualitatively explains the experimental results and serves as a simple guide for design of tunable nanomechanical devices.
| Item Type: | Article | ||||||
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| Additional Information: | © 2006 American Institute of Physics (Received 20 December 2005; accepted 19 April 2006; published online 19 June 2006) The authors acknowledge support from DARPA/MTO (SPAWAR) under Grant No. N66001-02-1-8914. The authors thank C.A. Zorman and M. Mehregany for providing SiC wafers, and are grateful to X.L. Feng, O. Kogan, M.C. Cross, and A. Husain for useful discussions. | ||||||
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| Subject Keywords: | micromechanical resonators; nanoelectronics | ||||||
| Issue or Number: | 25 | ||||||
| DOI: | 10.1063/1.2209211 | ||||||
| Record Number: | CaltechAUTHORS:KOZapl06 | ||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:KOZapl06 | ||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||
| ID Code: | 5165 | ||||||
| Collection: | CaltechAUTHORS | ||||||
| Deposited By: | Archive Administrator | ||||||
| Deposited On: | 04 Oct 2006 | ||||||
| Last Modified: | 08 Nov 2021 20:23 |
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