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Multifunctional Nanomechanical Systems via Tunably Coupled Piezoelectric Actuation

Masmanidis, Sotiris C. and Karabalin, Rassul B. and De Vlaminck, Iwijn and Borghs, Gustaaf and Freeman, Mark R. and Roukes, Michael L. (2007) Multifunctional Nanomechanical Systems via Tunably Coupled Piezoelectric Actuation. Science, 317 (5839). pp. 780-783. ISSN 0036-8075. doi:10.1126/science.1144793.

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Efficient actuation is crucial to obtaining optimal performance from nanoelectromechanical systems (NEMS). We employed epitaxial piezoelectric semiconductors to obtain efficient and fully integrated NEMS actuation, which is based on exploitation of the interaction between piezoelectric strain and built-in charge depletion. The underlying actuation mechanism in these depletion-mediated NEMS becomes important only for devices with dimensions approaching semiconductor depletion lengths. The induced actuation forces are controlled electrically, and resonant excitation approaching single-electron efficiency is demonstrated. The fundamental electromechanical coupling itself can be programmed by heterostructure band engineering, externally controllable charge depletion, and crystallographic orientation. These attributes are combined to realize a prototype, mechanically based, exclusive-or logic element.

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Roukes, Michael L.0000-0002-2916-6026
Additional Information:© 2007 American Association for the Advancement of Science. Received 8 May 2007; accepted 6 July 2007. This work was supported by the Defense Advanced Research Projects Agency Microsystems Technology Office Micro Gas Analyzer through Department of Interior contract no. NBCH1050001. We thank W. van de Graaf and S. Degroote for the epitaxial crystal deposition and P. Van Dorpe and J. M. Choi for discussions.
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
Department of InteriorNBCH1050001
Issue or Number:5839
Record Number:CaltechAUTHORS:20141114-105917629
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:51768
Deposited By: Tony Diaz
Deposited On:14 Nov 2014 22:08
Last Modified:10 Nov 2021 19:15

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