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Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography

Unger, Marc A. and Chou, Hou-Pu and Thorsen, Todd and Scherer, Axel and Quake, Stephen R. (2000) Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography. Science, 288 (5463). pp. 113-116. ISSN 0036-8075. https://resolver.caltech.edu/CaltechAUTHORS:20141117-090538623

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Abstract

Soft lithography is an alternative to silicon-based micromachining that uses replica molding of nontraditional elastomeric materials to fabricate stamps and microfluidic channels. We describe here an extension to the soft lithography paradigm, multilayer soft lithography, with which devices consisting of multiple layers may be fabricated from soft materials. We used this technique to build active microfluidic systems containing on-off valves, switching valves, and pumps entirely out of elastomer. The softness of these materials allows the device areas to be reduced by more than two orders of magnitude compared with silicon-based devices. The other advantages of soft lithography, such as rapid prototyping, ease of fabrication, and biocompatibility, are retained.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://www.sciencemag.org/content/288/5463/113.abstractPublisherArticle
http://dx.doi.org/10.1126/science.288.5463.113DOIArticle
Additional Information:© 2000 American Association for the Advancement of Science. 24 November 1999; accepted 14 February 2000. This work was partially supported by NIH (NS-11756, DA-9121).
Funders:
Funding AgencyGrant Number
NIHNS-11756
NIHDA-9121
Issue or Number:5463
Record Number:CaltechAUTHORS:20141117-090538623
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20141117-090538623
Official Citation:Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography Marc A. Unger, Hou-Pu Chou, Todd Thorsen, Axel Scherer, and Stephen R. Quake Science 7 April 2000: 288 (5463), 113-116. [DOI:10.1126/science.288.5463.113]
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:51821
Collection:CaltechAUTHORS
Deposited By: Ruth Sustaita
Deposited On:17 Nov 2014 21:26
Last Modified:03 Oct 2019 07:36

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