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Electron-beam-induced current measurements in silicon-on-insulator films prepared by zone-melting recrystallization

Maby, E. W. and Atwater, H. A. and Keigler, A. L. and Johnson, N. M. (1983) Electron-beam-induced current measurements in silicon-on-insulator films prepared by zone-melting recrystallization. Applied Physics Letters, 43 (5). pp. 482-484. ISSN 0003-6951. doi:10.1063/1.94359.

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Enhanced diffusion of arsenic along grain boundaries and subboundaries in zone-recrystallized silicon-on-insulator films has been measured by electron-beam-induced current analysis of lateral pn junctions fabricated in the films. A four-hour diffusion at 1100 °C resulted in protrusions of arsenic at the junction edges which measured approximately 3–5 µm along the grain boundaries and only 1–2 µm along the subboundaries. The results suggest that under more ordinary thermal processing conditions, field-effect transistors with channel lengths greater than about 1.5 µm can be randomly positioned with respect to the more numerous subboundaries, but grain boundaries should be avoided.

Item Type:Article
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URLURL TypeDescription
Atwater, H. A.0000-0001-9435-0201
Additional Information:© 1983 American Institute of Physics Received 5 May 1983; accepted for publication 10 June 1983 In the work at MIT, E. W. Maby was supported by the Defense Advanced Research Projects Agency, contract N0014-C-80-0622, and H. A. Atwater was supported by the Department of Energy, contract DE-AC02-80-ER13019.
Funding AgencyGrant Number
Office of Naval Research (ONR)N0014-C-80-0622
Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
Department of Energy (DOE)DE-AC02-80-ER13019
Subject Keywords:silicon; films; recrystallization; diffusion; grain boundaries; arsenic; p–n junctions; heat treatments; field effect transistors; silicon oxides; fabrication; very high temperature; scanning electron microscopy; electric currents; ebic
Issue or Number:5
Record Number:CaltechAUTHORS:MABapl83
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:5206
Deposited By: Archive Administrator
Deposited On:04 Oct 2006
Last Modified:08 Nov 2021 20:23

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