Flaherty, D. W. and Kasper, M. A. and Baio, J. E. and Graves, D. B. and Winters, H. F. and Winstead, C. and McKoy, V. (2006) Electron impact dissociation cross sections for C2F6. Journal of Physics D: Applied Physics, 39 (20). pp. 4393-4399. ISSN 0022-3727. doi:10.1088/0022-3727/39/20/015. https://resolver.caltech.edu/CaltechAUTHORS:FLAjpd06
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Abstract
Absolute total dissociation cross sections for electron impact, σt,diss, from 8 to 700 eV are reported for C2F6. A dense set of data was obtained in the technologically important 8–30 eV energy range relevant to modelling the type of plasmas used in both fundamental and applied scientific investigations. The threshold for dissociation was found to be 12.0 ± 0.2 eV and appears to be associated with a Rydberg state. Estimated values for the total neutral dissociation cross section, σneut,diss, were obtained by subtracting the ionization cross sections (all ionizing events cause dissociation) from the total dissociation cross section. It is shown that a calibration error in a paper by one of us (HFW) caused a distortion of several previous investigations. When the data from the present work are used to recalibrate data from swarm experiments, agreement becomes quite reasonable. There is now a consistent set of data obtained from several investigators which describe the dissociation of C2F6. Neutral dissociation cross sections are obtained from electron-impact excitation calculations and found to be in reasonable agreement with measurements over most of the energy range.
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| Additional Information: | © 2006 IOP Publishing Limited Received 5 August 2006, in final form 29 August 2006. Published 29 September 2006. Print publication: Issue 20 (21 October 2006) The authors acknowledge the IBM Almaden Research Center for donating much of the experimental apparatus. This research was funded in part by the NSF-SRC ERC for Environmentally Benign Semiconductor Manufacturing. Work by CW and VM was funded by Sematech Inc. and by the Department of Energy, Office of Basic Energy Sciences. The authors gratefully acknowledge Professor J H Moore for discussions and unpublished data. Additionally, assistance from Bing Ji of Air Products is greatly appreciated. | ||||||
| Issue or Number: | 20 | ||||||
| DOI: | 10.1088/0022-3727/39/20/015 | ||||||
| Record Number: | CaltechAUTHORS:FLAjpd06 | ||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:FLAjpd06 | ||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||
| ID Code: | 5368 | ||||||
| Collection: | CaltechAUTHORS | ||||||
| Deposited By: | Archive Administrator | ||||||
| Deposited On: | 15 Oct 2006 | ||||||
| Last Modified: | 12 Jul 2022 19:47 |
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