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MeV Ion Damage in III-V Semiconductors: Saturation and Thermal Annealing of Strain in GaAs and GaP Crystals

Wie, C. R. and Vreeland, T., Jr. and Tombrello, T. A. (1985) MeV Ion Damage in III-V Semiconductors: Saturation and Thermal Annealing of Strain in GaAs and GaP Crystals. Brown Bag Preprint Series in Basic and Applied Science, 34. California Institute of Technology , Pasadena, CA. (Unpublished)

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MeV ion irradiation of GaAs crystals at room temperature has shown that the lattice strain perpendicular to the sample surface saturates to ~0.47% for <100> cut and ~0.3% for <111> and <110> cut crystals with zero parallel strain in all cases. In this paper, the thermal recovery behavior of the saturated strain in GaAs (100) is presented for a 15 min isochronal annealing. The recovery of strain depth profile is shown explicitly by a dynamical theory analysis of the x-ray rocking curves taken after each annealing step. The isochronal recovery behavior of strain suggests that a spectrum of activation energies is involved in the thermal migration of defects in the saturated surface layer. This also suggests that many kinds of antisite defect complexes exist in the surface layer. The strain and related defects are also shown to saturate in MeV ion bombarded GaP (100) crystals. This may indicate that all the primary defects (interstitials, vacancies, and antisite defects) saturate under MeV ion irradiation of III-V compounds, and support the proposed ion-lattice single collision model of defect production and saturation under MeV ion irradiation. The linewidths of x-ray rocking curves obtained from GaP crystals bombarded at room temperature and at ~490 K indicate that low- temperature recovery stage defects cause major crystal distortion in III-V compounds. Also presented are the isochronal annealing behaviors of lattice strain, x-ray broadening, and peak reflecting power of room temperature irradiated GaP (100) crystals.

Item Type:Report or Paper (Technical Report)
Additional Information:Supported in part by the National Science Foundation [DMR83-18274] and the Caltech President's Fund.
Funding AgencyGrant Number
Caltech President’s FundUNSPECIFIED
Series Name:Brown Bag Preprint Series in Basic and Applied Science
Issue or Number:34
Record Number:CaltechAUTHORS:20150224-131609895
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:55154
Deposited By: Tony Diaz
Deposited On:24 Feb 2015 23:04
Last Modified:03 Oct 2019 08:03

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