A Caltech Library Service

Strong opto-electro-mechanical coupling in a silicon photonic crystal cavity

Pitanti, Alessandro and Fink, Johannes M. and Safavi-Naeini, Amir H. and Hill, Jeff T. and Lei, Chan U and Tredicucci, Alessandro and Painter, Oskar (2015) Strong opto-electro-mechanical coupling in a silicon photonic crystal cavity. Optics Express, 23 (3). pp. 3196-3208. ISSN 1094-4087. doi:10.1364/OE.23.003196.

[img] PDF - Published Version
See Usage Policy.


Use this Persistent URL to link to this item:


We fabricate and characterize a microscale silicon opto-electromechanical system whose mechanical motion is coupled capacitively to an electrical circuit and optically via radiation pressure to a photonic crystal cavity. To achieve large electromechanical interaction strength, we implement an inverse shadow mask fabrication scheme which obtains capacitor gaps as small as 30 nm while maintaining a silicon surface quality necessary for minimizing optical loss. Using the sensitive optical read-out of the photonic crystal cavity, we characterize the linear and nonlinear capacitive coupling to the fundamental ω_m/2π = 63 MHz in-plane flexural motion of the structure, showing that the large electromechanical coupling in such devices may be suitable for realizing efficient microwave-to-optical signal conversion.

Item Type:Article
Related URLs:
URLURL TypeDescription DOIArticle
Fink, Johannes M.0000-0001-8112-028X
Safavi-Naeini, Amir H.0000-0001-6176-1274
Painter, Oskar0000-0002-1581-9209
Additional Information:© 2015 Optical Society of America. Received 3 Dec 2014; revised 28 Jan 2015; accepted 29 Jan 2015; published 3 Feb 2015. This work was supported by the DARPA MESO program, the AFOSR Hybrid Nanophotonics MURI, the Institute for Quantum Information and Matter, an NSF Physics Frontiers Center with support of the Gordon and Betty Moore Foundation, and the Kavli Nanoscience Institute at Caltech. AP gratefully acknowledge funding from EU through Marie Curie Actions, project NEMO (GA 298861). AT acknowledges partial financial support from the ERC through the advanced grant SoulMan.
Group:Institute for Quantum Information and Matter, Kavli Nanoscience Institute
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
Air Force Office of Scientific Research (AFOSR)UNSPECIFIED
Institute for Quantum Information and Matter (IQIM)UNSPECIFIED
NSF Physics Frontiers CenterUNSPECIFIED
Gordon and Betty Moore FoundationUNSPECIFIED
Kavli Nanoscience InstituteUNSPECIFIED
Marie Curie FellowshipGA 298861
European Research Council (ERC)SoulMan
Issue or Number:3
Classification Code:OCIS codes: (230.5298) Photonic crystals; (230.3120) Integrated optics devices; (220.4880) Optomechanics; (280.4788) Optical sensing and sensors; (350.4238) Nanophotonics and photonic crystals
Record Number:CaltechAUTHORS:20150320-083611819
Persistent URL:
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:55939
Deposited By: Tony Diaz
Deposited On:20 Mar 2015 16:43
Last Modified:10 Nov 2021 20:52

Repository Staff Only: item control page