CaltechAUTHORS
  A Caltech Library Service

Combinatorial thin film composition mapping using three dimensional deposition profiles

Suram, Santosh K. and Zhou, Lan and Becerra-Stasiewicz, Natalie and Kan, Kevin and Jones, Ryan J. R. and Kendrick, Brian M. and Gregoire, John M. (2015) Combinatorial thin film composition mapping using three dimensional deposition profiles. Review of Scientific Instruments, 86 (3). Art. No. 033904. ISSN 0034-6748. https://resolver.caltech.edu/CaltechAUTHORS:20150323-110035126

[img] PDF - Published Version
See Usage Policy.

4Mb

Use this Persistent URL to link to this item: https://resolver.caltech.edu/CaltechAUTHORS:20150323-110035126

Abstract

Many next-generation technologies are limited by material performance, leading to increased interest in the discovery of advanced materials using combinatorial synthesis, characterization, and screening. Several combinatorial synthesis techniques, such as solution based methods, advanced manufacturing, and physical vapor deposition, are currently being employed for various applications. In particular, combinatorial magnetron sputtering is a versatile technique that provides synthesis of high-quality thin film composition libraries. Spatially addressing the composition of these thin films generally requires elemental quantification measurements using techniques such as energy-dispersive X-ray spectroscopy or X-ray fluorescence spectroscopy. Since these measurements are performed ex-situ and post-deposition, they are unable to provide real-time design of experiments, a capability that is required for rapid synthesis of a specific composition library. By using three quartz crystal monitors attached to a stage with translational and rotational degrees of freedom, we measure three-dimensional deposition profiles of deposition sources whose tilt with respect to the substrate is robotically controlled. We exhibit the utility of deposition profiles and tilt control to optimize the deposition geometry for specific combinatorial synthesis experiments.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1063/1.4914466DOIArticle
ORCID:
AuthorORCID
Suram, Santosh K.0000-0001-8170-2685
Zhou, Lan0000-0002-7052-266X
Jones, Ryan J. R.0000-0002-4629-3115
Gregoire, John M.0000-0002-2863-5265
Additional Information:© 2015 AIP Publishing LLC. Received 28 January 2015; accepted 26 February 2015; published online 17 March 2015. This manuscript is based upon work performed by the Joint Center for Artificial Photosynthesis, a DOE Energy Innovation Hub, supported through the Office of Science of the U.S. Department of Energy (Award No. DE-SC0004993). The authors thank Ryan R. J. Jones for assistance with chamber schematics, Frances Houle for insightful discussions, and Aniketa Shinde for assistance with the preparation of the manuscript.
Group:JCAP
Funders:
Funding AgencyGrant Number
Department of Energy (DOE)DE-SC0004993
Issue or Number:3
Record Number:CaltechAUTHORS:20150323-110035126
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20150323-110035126
Official Citation:Combinatorial thin film composition mapping using three dimensional deposition profiles Suram, Santosh K. and Zhou, Lan and Becerra-Stasiewicz, Natalie and Kan, Kevin and Jones, Ryan J. R. and Kendrick, Brian M. and Gregoire, John M., Review of Scientific Instruments, 86, 033904 (2015), DOI:http://dx.doi.org/10.1063/1.4914466
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:55967
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:23 Mar 2015 18:07
Last Modified:06 May 2020 22:19

Repository Staff Only: item control page