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Ultra-high-Q toroid microcavity on a chip

Armani, D. K. and Kippenberg, T. J. and Spillane, S. M. and Vahala, K. J. (2003) Ultra-high-Q toroid microcavity on a chip. Nature, 421 (6926). pp. 925-928. ISSN 0028-0836. https://resolver.caltech.edu/CaltechAUTHORS:20150401-103707712

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Abstract

The circulation of light within dielectric volumes enables storage of optical power near specific resonant frequencies and is important in a wide range of fields including cavity quantum electrodynamics, photonics, biosensing and nonlinear optics. Optical trajectories occur near the interface of the volume with its surroundings, making their performance strongly dependent upon interface quality. With a nearly atomic-scale surface finish, surface-tension-induced microcavities such as liquid droplets or spheres are superior to all other dielectric microresonant structures when comparing photon lifetime or, equivalently, cavity Q factor. Despite these advantageous properties, the physical characteristics of such systems are not easily controlled during fabrication. It is known that wafer-based processing of resonators can achieve parallel processing and control, as well as integration with other functions. However, such resonators-on-a-chip suffer from Q factors that are many orders of magnitude lower than for surface-tension-induced microcavities, making them unsuitable for ultra-high-Q experiments. Here we demonstrate a process for producing silica toroid-shaped microresonators-on-a-chip with Q factors in excess of 100 million using a combination of lithography, dry etching and a selective reflow process. Such a high Q value was previously attainable only by droplets or microspheres and represents an improvement of nearly four orders of magnitude over previous chip-based resonators.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1038/nature01371DOIArticle
http://www.nature.com/nature/journal/v421/n6926/full/nature01371.htmlPublisherArticle
http://rdcu.be/cscrPublisherFree ReadCube access
ORCID:
AuthorORCID
Kippenberg, T. J.0000-0002-3408-886X
Vahala, K. J.0000-0003-1783-1380
Additional Information:© 2003 Nature Publishing Group. Received 10 October; accepted 16 December 2002. This work was supported by DARPA and the Caltech Lee Center.
Funders:
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
Caltech Lee Center for Advanced NetworkingUNSPECIFIED
Issue or Number:6926
Record Number:CaltechAUTHORS:20150401-103707712
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20150401-103707712
Official Citation:Ultra-high-Q toroid microcavity on a chip p925 D. K. Armani, T. J. Kippenberg, S. M. Spillane and K. J. Vahala doi:10.1038/nature01371
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:56281
Collection:CaltechAUTHORS
Deposited By: Ruth Sustaita
Deposited On:01 Apr 2015 19:04
Last Modified:09 Mar 2020 13:19

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