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Photolithographic olefin metathesis polymerization

Weitekamp, Raymond and Atwater, Harry and Grubbs, Robert H. (2015) Photolithographic olefin metathesis polymerization. Abstracts of Papers of the American Chemical Society, 249 . PMSE-211. ISSN 0065-7727.

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Current methods of lithog. patterning materials rely on acid- and radical-catalyzed reactions, which are incompatible with many desirable functionalities. As a result, templating steps are required to pattern the materials of interest, through geometric inversion or surface coating. By the end of the process, the photoresist is typically discarded in its entirety, and many extra steps, each with their own compatibility concerns, are required to achieve the desired patterned functionality. We aim to replace these cumbersome steps with a straightforward approach to the fabrication of functional materials, interfaces and nanostructures. We have developed a lithog. technique using a ruthenium photocatalyst, termed <u>P</u>hoto<u>L< /u>ithog. <u>O</u>lefin <u>M</u>etathesis <u>P</u>olymerization (PLOMP), which is able to directly photopattern a wide variety of functional materials on the micro- and nanoscale. In this procedure, a latent metathesis catalyst is activated by UV light to react with the olefins in the surrounding environment. We have devised a recipe that incorporates all of the reagents into the PLOMP photoresist, enabling the waste-free synthesis of a versatile patterning platform in a quick one-pot reaction. A vast array of functional groups can be incorporated into PLOMP photoresists, and used for a no. of lithog. applications.

Item Type:Article
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URLURL TypeDescription Website
Atwater, Harry0000-0001-9435-0201
Grubbs, Robert H.0000-0002-0057-7817
Additional Information:© 2015 American Chemical Society.
Record Number:CaltechAUTHORS:20150407-131236235
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:56433
Deposited By: Tony Diaz
Deposited On:07 Apr 2015 21:43
Last Modified:03 Oct 2019 08:13

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