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Fabrication of a tungsten master stamp using self-ordered porous alumina

Choi, Jinsub and Park, Young-Bae and Scherer, Axel (2005) Fabrication of a tungsten master stamp using self-ordered porous alumina. Nanotechnology, 16 (9). pp. 1655-1659. ISSN 0957-4484. doi:10.1088/0957-4484/16/9/042.

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We describe the preparation of a tungsten pillar nanoimprint stamp without the use of lithography and etching techniques. Structures with heights of 15 nm were prepared on the basis of self-ordered porous alumina templates and this was followed by DC sputtering of tungsten. The stamp was successfully used to prepare an aluminium surface to obtain highly ordered porous anodic alumina films after a single anodization step. The preparation efficiency for highly ordered porous alumina was dramatically improved as compared to the more conventional two-step anodization–strip-anodization method, as a sacrificial layer with a thickness of a few hundred micrometres was not required. In addition, by fractal calculations, we have evaluated the degree of ordering of the asperities on the nanoimprint master stamp.

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Additional Information:© 2005 IOP Publishing Ltd. Received 3 May 2005, in final form 25 May 2005. Published 6 July 2005. Print publication: Issue 9 (September 2005).
Issue or Number:9
Record Number:CaltechAUTHORS:CHOnanotech05
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:566
Deposited By: Tony Diaz
Deposited On:23 Aug 2005
Last Modified:12 Jul 2022 19:41

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