Liu, Rui and Han, Lihao and Huang, Zhuangqun and Ferrer, Ivonne M. and Smets, Arno H. M. and Zeman, Miro and Brunschwig, Bruce S. and Lewis, Nathan S. (2015) A low-temperature synthesis of electrochemical active Pt nanoparticles and thin films by atomic layer deposition on Si(111) and glassy carbon surfaces. Thin Solid Films, 586 . pp. 28-34. ISSN 0040-6090. doi:10.1016/j.tsf.2015.04.018. https://resolver.caltech.edu/CaltechAUTHORS:20150504-140234191
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Abstract
Atomic layer deposition (ALD) was used to deposit nanoparticles and thin films of Pt onto etched p-type Si(111) wafers and glassy carbon discs. Using precursors of MeCpPtMe_3 and ozone and a temperature window of 200–300 °C, the growth rate was 80–110 pm/cycle. X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), and scanning electron microscopy (SEM) were used to analyze the composition, structure, morphology, and thickness of the ALD-grown Pt nanoparticle films. The catalytic activity of the ALD-grown Pt for the hydrogen evolution reaction was shown to be equivalent to that of e-beam evaporated Pt on glassy carbon electrode.
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| Additional Information: | © 2015 Elsevier B.V. Received 29 August 2014; Received in revised form 6 April 2015; Accepted 9 April 2015; Available online 18 April 2015. This work was supported by the Joint Center for Artificial Photosynthesis, a DOE Energy Innovation Hub, supported through the Office of Science of the U.S. Department of Energy under Award Number DE-SC0004993. BSB was supported by the Beckmann Institute of California Institute of Technology. Research was in part carried out at the Molecular Materials Research Center of the Beckman Institute of the California Institute of Technology. LH would like to thank the VIDI project granted to Dr. Arno H.M. Smets by NWO-STW to financially support his stay in California Institute of Technology. | |||||||||
| Group: | JCAP | |||||||||
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| Subject Keywords: | Atomic layer deposition; Platinum; Nanoparticles; Thin films; Water splitting; Hydrogen evolution | |||||||||
| DOI: | 10.1016/j.tsf.2015.04.018 | |||||||||
| Record Number: | CaltechAUTHORS:20150504-140234191 | |||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20150504-140234191 | |||||||||
| Official Citation: | Rui Liu, Lihao Han, Zhuangqun Huang, Ivonne M. Ferrer, Arno H.M. Smets, Miro Zeman, Bruce S. Brunschwig, Nathan S. Lewis, A low-temperature synthesis of electrochemical active Pt nanoparticles and thin films by atomic layer deposition on Si(111) and glassy carbon surfaces, Thin Solid Films, Volume 586, 1 July 2015, Pages 28-34, ISSN 0040-6090, http://dx.doi.org/10.1016/j.tsf.2015.04.018. (http://www.sciencedirect.com/science/article/pii/S0040609015003636) | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 57205 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | Tony Diaz | |||||||||
| Deposited On: | 06 May 2015 17:21 | |||||||||
| Last Modified: | 10 Nov 2021 21:09 |
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