Johnson, R. W. and Johnson, W. L. (1988) X-ray diffractometer stage for in situ structural analysis of thin films. Review of Scientific Instruments, 59 (12). pp. 2568-2572. ISSN 0034-6748. http://resolver.caltech.edu/CaltechAUTHORS:JOHrsi88
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Abstract
A theta-two theta x-ray diffractometer stage has been developed for in situ structural characterization of thin-film samples. This stage integrates an ultrahigh vacuum dc ion-beam thin-film sample preparation chamber with the Siemens D500 x-ray diffractometer. In vacuo sample translation and manipulation is provided. The stage incorporates resistive heating to 900 K and liquid nitrogen cooling to 150 K. The sample theta rotation is transmitted into the vacuum chamber by a rotary feedthrough. X rays enter the vacuum chamber through a beryllium window with allowed reflection angles from 0 to +168° two-theta.
| Item Type: | Article |
|---|---|
| Additional Information: | Copyright © 1988 American Institute of Physics (Received 7 July 1988; accepted 19 August 1988) This work has been supported by the National Science Foundation-Materials Research Groups Grant No. DMR 8421119. |
| Subject Keywords: | X–RAY DIFFRACTION; SAMPLE HOLDERS; DESIGN; X–RAY DIFFRACTION ANALYSIS; THIN FILMS; ULTRAHIGH VACUUM; CRYOGENICS; AMORPHIZATION |
| Issue or Number: | 12 |
| Record Number: | CaltechAUTHORS:JOHrsi88 |
| Persistent URL: | http://resolver.caltech.edu/CaltechAUTHORS:JOHrsi88 |
| Alternative URL: | http://dx.doi.org/10.1063/1.1139899 |
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. |
| ID Code: | 5770 |
| Collection: | CaltechAUTHORS |
| Deposited By: | Archive Administrator |
| Deposited On: | 01 Nov 2006 |
| Last Modified: | 26 Dec 2012 09:15 |
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