X-ray diffractometer stage for in situ structural analysis of thin films

Johnson, R. W. and Johnson, W. L. (1988) X-ray diffractometer stage for in situ structural analysis of thin films. Review of Scientific Instruments, 59 (12). pp. 2568-2572. ISSN 0034-6748. https://resolver.caltech.edu/CaltechAUTHORS:JOHrsi88

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Abstract

A theta-two theta x-ray diffractometer stage has been developed for in situ structural characterization of thin-film samples. This stage integrates an ultrahigh vacuum dc ion-beam thin-film sample preparation chamber with the Siemens D500 x-ray diffractometer. In vacuo sample translation and manipulation is provided. The stage incorporates resistive heating to 900 K and liquid nitrogen cooling to 150 K. The sample theta rotation is transmitted into the vacuum chamber by a rotary feedthrough. X rays enter the vacuum chamber through a beryllium window with allowed reflection angles from 0 to +168° two-theta.

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Article

Related URLs:

URL	URL Type	Description
https://doi.org/10.1063/1.1139899	DOI	UNSPECIFIED

Additional Information:

Copyright © 1988 American Institute of Physics (Received 7 July 1988; accepted 19 August 1988) This work has been supported by the National Science Foundation-Materials Research Groups Grant No. DMR 8421119.

Subject Keywords:

X–RAY DIFFRACTION; SAMPLE HOLDERS; DESIGN; X–RAY DIFFRACTION ANALYSIS; THIN FILMS; ULTRAHIGH VACUUM; CRYOGENICS; AMORPHIZATION

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CaltechAUTHORS:JOHrsi88

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https://resolver.caltech.edu/CaltechAUTHORS:JOHrsi88

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5770

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CaltechAUTHORS

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Deposited On:

01 Nov 2006

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02 Oct 2019 23:26

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