Johnson, R. W. and Johnson, W. L. (1988) X-ray diffractometer stage for in situ structural analysis of thin films. Review of Scientific Instruments, 59 (12). pp. 2568-2572. ISSN 0034-6748. doi:10.1063/1.1139899. https://resolver.caltech.edu/CaltechAUTHORS:JOHrsi88
![]()
|
PDF
See Usage Policy. 722kB |
Use this Persistent URL to link to this item: https://resolver.caltech.edu/CaltechAUTHORS:JOHrsi88
Abstract
A theta-two theta x-ray diffractometer stage has been developed for in situ structural characterization of thin-film samples. This stage integrates an ultrahigh vacuum dc ion-beam thin-film sample preparation chamber with the Siemens D500 x-ray diffractometer. In vacuo sample translation and manipulation is provided. The stage incorporates resistive heating to 900 K and liquid nitrogen cooling to 150 K. The sample theta rotation is transmitted into the vacuum chamber by a rotary feedthrough. X rays enter the vacuum chamber through a beryllium window with allowed reflection angles from 0 to +168° two-theta.
Item Type: | Article | ||||||
---|---|---|---|---|---|---|---|
Related URLs: |
| ||||||
Additional Information: | Copyright © 1988 American Institute of Physics (Received 7 July 1988; accepted 19 August 1988) This work has been supported by the National Science Foundation-Materials Research Groups Grant No. DMR 8421119. | ||||||
Subject Keywords: | X–RAY DIFFRACTION; SAMPLE HOLDERS; DESIGN; X–RAY DIFFRACTION ANALYSIS; THIN FILMS; ULTRAHIGH VACUUM; CRYOGENICS; AMORPHIZATION | ||||||
Issue or Number: | 12 | ||||||
DOI: | 10.1063/1.1139899 | ||||||
Record Number: | CaltechAUTHORS:JOHrsi88 | ||||||
Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:JOHrsi88 | ||||||
Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||
ID Code: | 5770 | ||||||
Collection: | CaltechAUTHORS | ||||||
Deposited By: | Archive Administrator | ||||||
Deposited On: | 01 Nov 2006 | ||||||
Last Modified: | 08 Nov 2021 20:28 |
Repository Staff Only: item control page