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Realizing the diamond annular groove phase masks for the mid infrared region - five years of successful process development of diamond plasma etching

Forsberg, Pontus and Vargas, Ernesto and Delacroix, Christian and Absil, Olivier and Carlomagno, Brunella and Mawet, Dimitri and Habraken, Serge and Surdej, Jean and Karlsson, Mikael (2014) Realizing the diamond annular groove phase masks for the mid infrared region - five years of successful process development of diamond plasma etching. In: Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation. Proceedings of SPIE. No.9151. Society of Photo-Optical Instrumentation Engineers (SPIE) , Bellingham, WA, Art. No. 915119. ISBN 9780819496195. https://resolver.caltech.edu/CaltechAUTHORS:20150521-103828598

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Abstract

The Annular Groove Phase Mask (AGPM) is a circularly symmetric half wave plate consisting of a circular high aspect ratio sub-wavelength grating. Here we present a method for realizing such structures in diamond. To improve the AGPM performance, antireflective sub-wavelength gratings are etched on the backside of the components, and such gratings are also discussed. Components for the N-band (around 10 μm) and the L-band (around 3.8 μm) have been successfully fabricated. We are currently developing the process further to improve the precision of the gratings and produce an AGPM for the K-band (around 2.2 μm).


Item Type:Book Section
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1117/12.2055475DOIArticle
http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1890900PublisherArticle
ORCID:
AuthorORCID
Absil, Olivier0000-0002-4006-6237
Mawet, Dimitri0000-0002-8895-4735
Surdej, Jean0000-0002-7005-1976
Karlsson, Mikael0000-0002-2011-0851
Additional Information:© 2014 Society of Photo-Optical Instrumentation Engineers (SPIE). Date Published: 7 August 2014. The research leading to these results has received funding from the European Research Council under the European Union's Seventh Framework Programme (ERC Grant Agreement n.337569) and from the French Community of Belgium through an ARC grant for Concerted Research Actions. O.A. is a Research Associate of the F.R.S.-FNRS (Belgium).
Funders:
Funding AgencyGrant Number
European Research Council (ERC)337569
Communauté française de Belgique – Actions de recherche concertéesUNSPECIFIED
Fonds de la Recherche Scientifique (FNRS)UNSPECIFIED
Subject Keywords:Gratings, diamond, coronagraphy, microfabrication
Series Name:Proceedings of SPIE
Issue or Number:9151
Record Number:CaltechAUTHORS:20150521-103828598
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20150521-103828598
Official Citation:Pontus Forsberg ; Ernesto Vargas ; Christian Delacroix ; Olivier Absil ; Brunella Carlomagno, et al. " Realizing the diamond annular groove phase masks for the mid infrared region: five years of successful process development of diamond plasma etching ", Proc. SPIE 9151, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation, 915119 (August 7, 2014); doi:10.1117/12.2055475; http://dx.doi.org/10.1117/12.2055475
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:57737
Collection:CaltechAUTHORS
Deposited By: Ruth Sustaita
Deposited On:21 May 2015 20:11
Last Modified:29 Oct 2019 23:36

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