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Design and Fabrication of Silicon Photonic Crystal Optical Waveguides

Lončar, Marko and Doll, Theodor and Vučković, Jelena and Scherer, Axel (2000) Design and Fabrication of Silicon Photonic Crystal Optical Waveguides. Journal of Lightwave Technology, 18 (10). pp. 1402-1411. ISSN 0733–8724. http://resolver.caltech.edu/CaltechAUTHORS:LONjlt00

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Abstract

We have designed and fabricated waveguides that incorporate two-dimensional (2-D) photonic crystal geometry for lateral confinement of light, and total internal reflection for vertical confinement. Both square and triangular photonic crystal lattices were analyzed. A three-dimensional (3-D) finite-difference time-domain (FDTD) analysis was used to find design parameters of the photonic crystal and to calculate dispersion relations for the guided modes in the waveguide structure. We have developed a new fabrication technique to define these waveguides into silicon-on-insulator material. The waveguides are suspended in air in order to improve confinement in the vertical direction and symmetry properties of the structure. High-resolution fabrication allowed us to include different types of bends and optical cavities within the waveguides.


Item Type:Article
Related URLs:
URLURL TypeDescription
https://doi.org/10.1109/50.887192DOIArticle
ORCID:
AuthorORCID
Lončar, Marko0000-0002-5029-5017
Additional Information:© 2000 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.” Manuscript received December 23, 1999; revised June 28, 2000. This work was supported in part by the AFOSR under Contract AFS-49620-98-1-01447. The authors gratefully acknowledge many fruitful discussions with O. Painter, R. Lee, and Prof. A. Yariv from Caltech, Pasadena, CA, and D. Nedeljkovic and T. P. Pearsall from Corning, Inc., (France). The authors also wish to thank Prof. Yariv for making his laboratory and polishing and cleaving equipment available to them to conduct these experiments.
Funders:
Funding AgencyGrant Number
Air Force Office of Scientific Research (AFOSR)AFS-49620-98-1-01447
Subject Keywords:Finite-difference time-domain (FDTD) methods, nanooptics, optical device fabrication, photonic bandgap (PBG) materials, photonic crystals (PCS), photonic crystal waveguides
Record Number:CaltechAUTHORS:LONjlt00
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:LONjlt00
Official Citation:M. Loncar, T. Doll, J. Vuckovic and A. Scherer, "Design and fabrication of silicon photonic crystal optical waveguides," in Journal of Lightwave Technology, vol. 18, no. 10, pp. 1402-1411, Oct. 2000. doi: 10.1109/50.887192
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:584
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:29 Aug 2005
Last Modified:12 Mar 2019 17:24

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