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A modified molecular beam instrument for the imaging of radicals interacting with surfaces during plasma processing

McCurdy, Patrick R. and Bogart, K. H. A. and Dalleska, N. F. and Fisher, Ellen R. (1997) A modified molecular beam instrument for the imaging of radicals interacting with surfaces during plasma processing. Review of Scientific Instruments, 68 (4). pp. 1684-1693. ISSN 0034-6748. http://resolver.caltech.edu/CaltechAUTHORS:20150622-144456802

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Abstract

A new instrument employing molecular beam techniques and laser induced fluorescence(LIF) for measuring the reactivity of gas phase radicals at the surface of a depositing film has been designed and characterized. The instrument uses an inductively coupled plasma source to create a molecular beam containing essentially all plasma species. A tunable excimer pumped dye laser is used to excite a single species in this complex molecular beam.LIF signals are imaged onto a gated, intensified charge coupled device (ICCD) to provide spatial resolution. ICCD images depict the fluorescence from molecules both in the molecular beam and scattering from the surface of a depositing film. Data collected with and without a substrate in the path of the molecular beam provide information about the surface reactivity of the species of interest. Here, we report the first measurements using the third generation imaging of radicals interacting with surfaces apparatus. We have measured the surface reactivity of SiH molecules formed in a 100% SiH_4 plasma during deposition of an amorphous hydrogenated silicon film. On a 300 K Si (100) substrate, the reactivity of SiH is near unity. The substrate temperature dependence (300–673 K) of the reactivity is also reported. In addition, reactivity measurements for OH molecules formed in a water plasma are presented. In contrast to the SiH molecule, the reactivity of OH radicals is 0.55±0.05 on the surface of a Si (100) substrate.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1063/1.1147976DOIArticle
http://scitation.aip.org/content/aip/journal/rsi/68/4/10.1063/1.1147976PublisherArticle
ORCID:
AuthorORCID
Dalleska, N. F.0000-0002-2059-1587
Additional Information:© 1997 American Institute of Physics. (Received 4 October 1996; accepted for publication 11 December 1996) Support for this research comes from the Office of Naval Research and Sandia National Laboratories. The authors also acknowledge support from Colorado State University through the Faculty Diversity Career Enhancement Fund and Faculty Research Grants program.
Funders:
Funding AgencyGrant Number
Office of Naval Research (ONR)UNSPECIFIED
Sandia National LaboratoriesUNSPECIFIED
Colorado State UniversityUNSPECIFIED
Record Number:CaltechAUTHORS:20150622-144456802
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20150622-144456802
Official Citation:A modified molecular beam instrument for the imaging of radicals interacting with surfaces during plasma processing McCurdy, Patrick R. and Bogart, K. H. A. and Dalleska, N. F. and Fisher, Ellen R., Review of Scientific Instruments, 68, 1684-1693 (1997), DOI:http://dx.doi.org/10.1063/1.1147976
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:58416
Collection:CaltechAUTHORS
Deposited By: George Porter
Deposited On:22 Jun 2015 22:49
Last Modified:11 Apr 2017 16:24

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