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Micro/Nano Gas Sensors: A New Strategy Towards In-Situ Wafer-Level Fabrication of High-Performance Gas Sensing Chips

Xu, Lei and Dai, Zhengfei and Duan, Guotao and Guo, Lianfeng and Wang, Yi and Zhou, Hong and Liu, Yanxiang and Cai, Weiping and Wang, Yuelin and Li, Tie (2015) Micro/Nano Gas Sensors: A New Strategy Towards In-Situ Wafer-Level Fabrication of High-Performance Gas Sensing Chips. Scientific Reports, 5 (5). Art. No. 10507 . ISSN 2045-2322. PMCID PMC5377049. http://resolver.caltech.edu/CaltechAUTHORS:20150625-160343008

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Abstract

Nano-structured gas sensing materials, in particular nanoparticles, nanotubes, and nanowires, enable high sensitivity at a ppb level for gas sensors. For practical applications, it is highly desirable to be able to manufacture such gas sensors in batch and at low cost. We present here a strategy of in-situ wafer-level fabrication of the high-performance micro/nano gas sensing chips by naturally integrating microhotplatform (MHP) with nanopore array (NPA). By introducing colloidal crystal template, a wafer-level ordered homogenous SnO_2 NPA is synthesized in-situ on a 4-inch MHP wafer, able to produce thousands of gas sensing units in one batch. The integration of micromachining process and nanofabrication process endues micro/nano gas sensing chips at low cost, high throughput, and with high sensitivity (down to ~20 ppb), fast response time (down to ~1 s), and low power consumption (down to ~30 mW). The proposed strategy of integrating MHP with NPA represents a versatile approach for in-situ wafer-level fabrication of high-performance micro/nano gas sensors for real industrial applications.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1038/srep10507DOIArticle
http://www.nature.com/srep/2015/150522/srep10507/full/srep10507.htmlPublisherArticle
http://www.nature.com/srep/2015/150522/srep10507/full/srep10507.html#supplementary-informationPublisherSupporting Information
https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5377049/PubMed CentralArticle
Additional Information:© 2015 Macmillan Publishers Limited. This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ Received 22 October 2014; Accepted 15 April 2015; Published 22 May 2015. This work was supported in part by the National Basic Research Program of China (no. 2012CB934102), the National Science and Technology Supporting Program (no. 2012BAJ11B01), the Fund for Creative Research of National Natural Science Foundation of China (no. 61321492), the Key Project of National Natural Science Foundation of China (no. 91323304, and 91123037), the Project for Shanghai Outstanding Academic leaders (no. 15XD1504300), and by the project of NSFC for young scholars: (no. 61306143). Author Contributions: L.X. and Z.D. designed the study, performed experiments, and wrote the paper. T.L., and G.D. conceived the idea and designed the study. L.G., Y.W., H.Z. and Y.L. contributed to experimental setups. W.C., and Y.W. designed the study. All authors reviewed the manuscript.
Funders:
Funding AgencyGrant Number
National Basic Research Program of China2012CB934102
National Science and Technology Supporting Program2012BAJ11B01
National Natural Science Foundation of China Fund for Creative Research61321492
National Natural Science Foundation of China Fund Key Project91323304
National Natural Science Foundation of China Fund Key Project91123037
Project for Shanghai Outstanding Academic leaders15XD1504300
National Natural Science Foundation of China61306143
PubMed Central ID:PMC5377049
Record Number:CaltechAUTHORS:20150625-160343008
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20150625-160343008
Official Citation:Xu, L. et al. Micro/Nano Gas Sensors: A New Strategy Towards In-Situ Wafer-Level Fabrication of High-Performance Gas Sensing Chips. Sci. Rep. 5, 10507; doi: 10.1038/srep10507(2015).
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:58626
Collection:CaltechAUTHORS
Deposited By: Joanne McCole
Deposited On:26 Jun 2015 19:35
Last Modified:18 Jul 2017 19:31

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